Rapid, Precise, Computer-controlled Measurement of X-Y Coordinates

Abstract

An experimental .r-y measurement system is described that was designed for the high-speed. high-precision measurements required in integrated circuit manufacturing and for optical measurement applications in which a sufficiently large data base is required for statistical process analysis. The technology for this experimental system differs considerably from that of conventional optical measuring systems in current use and utilizes a computer for data acquisition. manipulation and evaluation. The system, utilizing the edge detection principle, presently operates at a measuring speed of 2.5 cm/s. An analysis gives both the short-term and the long-term precision of the system. The standard deviation for the short-term precision is 0.038 iuc: