Rapid hot embossing of polymer microfeatures

Kimerling, Thomas E.; Liu, Weidan; Kim, Byung H.; Yao, Donggang

doi:10.1007/s00542-006-0098-y

Cited by 67 publications

(40 citation statements)

References 15 publications

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“…The mechanisms for cavity filling and process optimizations in polymer embossing have been widely investigated and reported by many groups (Rowland and King 2004;Kimerling et al 2006;Datta and Goettert 2007;Mekaru et al 2008), and it has been successfully used for manufacturing micro components for fluidic devices and systems.…”

Section: Introductionmentioning

confidence: 99%

Study on micro hot embossing of low temperature co-firable ceramic green substrates

et al. 2008

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Multi-layered ceramic substrates with embedded micro patterns are becoming increasingly important, for example, in harsh environment electronics, enabling microsystems and microfluidic devices. Fabrication of these embedded micro patterns, such as micro channels, cavities and vias, is a challenge. This study focuses on the process aspects of patterning micro features on low temperature co-firable ceramic (LTCC) green substrates using micro hot embossing. Green ceramic tapes that possessed near-zero shrinkage in the x-y plane were used, six layers of which were stacked and laminated as a substrate. The process parameters that impact on the embossing fidelity were investigated and optimized in this study. Micro features with channel-width as small as several micrometers were formed on green ceramic substrates. The dynamic thermo-mechanical analysis indicated that extending the holding time at a certain temperature range would harden the substrates with little effect on improving the embossing fidelity. Ceramic substrates with embossed micro patterns were obtained after co-firing; the shrinkage ratios of the embossed depth and channel-width were 8-15 and 12-17%, respectively. The changes of pitches between two embossed channels were within ±1.0% due to the interlocking effect of the ceramic tapes.

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Section: Introductionmentioning

confidence: 99%

Study on micro hot embossing of low temperature co-firable ceramic green substrates

et al. 2008

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“…2 Despite its effectiveness in replicating micro/nano features, hot embossing has a drawback in its long cycle time. 3 Injection molding is advantageous in its high productivity and flexibility, and has recently been applied in the fabrication of micro-features. 4 The challenge in micro-injection molding is to overcome difficulty of filling micro-channels.…”

Section: Introductionmentioning

confidence: 99%

Development of composite micro-patterns on polymer film using repetitive ultrasonic imprinting

Lee

Park

2014

Int. J. of Precis. Eng. and Manuf.-Green Tech.

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Ultrasonic imprinting is a novel process in which micro-patterns can be replicated on thermoplastic polymer with short processing time and low energy consumption. Ultrasonic imprinting uses ultrasonic vibration energy to soften thermoplastic polymer, and to replicate micro-patterns on the softened polymer surface from a patterned horn or mold. In this study, a new patterning method based on ultrasonic imprinting is proposed to develop composite micro-patterns using a simply-patterned mold. The proposed patterning technology uses repetitive ultrasonic imprinting in which a patterned replica is imprinted repeatedly on a rotated position. To implement this process for the development of composite micro-patterns, two-step repetitive imprinting with 90 o rotation was performed using a prism-patterned mold, from which pyramid patterns can be developed. This repetitive imprinting was then further applied to fabricate composite micro-patterns that contain prism and pyramid micropatterns on a single polymer film.

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“…Micro embossing was usually used for micro patterning on polymeric substrates for the fabrication of microfluidic devices (Becker and Heim 2000;Heckele et al 2006;Kimerling et al 2006) and optical systems (Shan et al 2005). It uses a template to press onto a substrate material under a certain pressure and a temperature to transfer the template patterns onto the substrate.…”

Section: Introductionmentioning

confidence: 99%

Study of mechanical response in micro-indentation of laminated ceramic green substrates

Liu

Shan

2008

Microsyst Technol

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Micro-indentation at elevated temperature is an effective method for studying the mechanical response of a material used in micro embossing. In this study, microindentation was performed on co-firable green ceramic substrates for the purpose of simulating micro embossing process and investigating the mechanical response at certain temperature. The laminated low temperature co-firable ceramic (LTCC) green tapes were used as the testing materials, the correlations of indentation depth versus applied force at various temperatures ranging from 25 to 75°C were studied. The results showed that permanent indentation cavities could be formed and retained at the temperatures ranging from 25 to 75°C; the depth of cavities created was applied force, temperature and holding time dependent. Creep during holding period occurred and made a significant contribution to the plastic deformation at elevated temperatures. There were instantaneous recoveries during the unloading and cooling processes, and retarded recovery in the first day after indentation as well. No significant pile-up around the indented cavities at the temperatures up to 75°C was observed, suggesting that there was little material flow during indentation at this temperature range. The indented cavities on green ceramic substrates were formed mainly due to the plastic deformation under compression. The findings could be used as a guideline for micro embossing of ceramic green substrates.

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Rapid hot embossing of polymer microfeatures

Cited by 67 publications

References 15 publications

Study on micro hot embossing of low temperature co-firable ceramic green substrates

Study on micro hot embossing of low temperature co-firable ceramic green substrates

Development of composite micro-patterns on polymer film using repetitive ultrasonic imprinting

Study of mechanical response in micro-indentation of laminated ceramic green substrates

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