Rapid fabrication of semiellipsoid microlens using thermal reflow with two different photoresists

Lian, Zhen-Jie; Hung, Shih-Yu; Shen, M.H.; Yang, Hsiharng

doi:10.1016/j.mee.2013.10.025

Cited by 45 publications

(18 citation statements)

References 28 publications

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“…Recently, rapid fabrication of semiellipsoid microlenses using thermal reflow with two different photoresists has been proposed [49]. A coupling efficiency of up to 85% can be obtained using a semiellipsoid microlens.…”

Section: Thermal Reflow Of Photoresistmentioning

confidence: 99%

Fabrication, characterization, and applications of microlenses

et al. 2015

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Microlenses (MLs) and microlens arrays (MLAs) are assuming an increasingly important role in optical devices. In response to this rapid evolution in technology, emphasis is being placed on research into new manufacturing methods for these devices as well as the characterization of their performance. This paper provides an overview of the fabrication of MLs and MLAs by electrical, mechanical, chemical, and optical methods. As each processing method has distinct advantages and limitations, the most significant characteristic parameters and the measurement of these parameters are discussed for each method. These parameters are then used as indices to evaluate and improve each of the processing methods. Some examples of practical applications of MLAs, especially for micromechanical optoelectronic devices, are also given. This paper aims to summarize the present development and the state of the art in processing technology of MLs and MLAs.

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Section: Thermal Reflow Of Photoresistmentioning

confidence: 99%

Fabrication, characterization, and applications of microlenses

et al. 2015

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“…Various microlenses and microarray structures have been fabricated in a range of substrates using techniques, such as photolithography/reactive ion etching [3][4][5][6][7], surface tension-based curing [10,11], laser ablation, engraving and thermal expansion [8,9,[12][13][14], thermal reflow [15,16], embossing [17,18] and inkjetting [19,20]. Of these fabrication processes, CO 2 laser engraving is an attractive alternative to established micro-manufacturing techniques for the production of optical components, and such a technology has a rapid turnaround time and does not require fixed photomasks, embossing tools or a clean room environment and is suited to polymer manufacturing, a substrate most commonly used for the fabrication of various microsystems [8,9,[21][22][23][24][25].…”

Section: Open Accessmentioning

confidence: 99%

CO2 Laser Manufacturing of Miniaturised Lenses for Lab-on-a-Chip Systems

Mohammed

Desmulliez

2014

Micromachines

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This article describes the manufacturing and characterisation of plano-convex miniaturised lenses using a CO 2 laser engraving process in PMMA substrates. The technique allows for lenses to be fabricated rapidly and in a reproducible manner at depths of over 200 µm and for lens diameters of more than 3 mm. Experimental characterisation of the lens focal lengths shows good correlation with theory. The plano-convex lenses have been successfully embedded into capillary microfluidic systems alongside planar microlenses, allowing for a significant reduction of ancillary optics without a loss of detection sensitivity when performing fluorescence measurements. Such technology provides a significant step forward towards the portability of fluorescence-or luminescence-based systems for biological/chemical analysis.

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“…[1][2][3][4][5] For fabrication of various kinds of the microlens arrays which satisfy specific requirements of each purpose, many researchers have been developing the fabrication processes of the micro-structures using diverse methods and materials. [6][7][8][9] One of the conventional methods is the thermal reflow process. 1,7,10 The reflow process consists of several steps as follows.…”

Section: Introductionmentioning

confidence: 99%

“…[6][7][8][9] One of the conventional methods is the thermal reflow process. 1,7,10 The reflow process consists of several steps as follows. At first, circular pillar structures, which are usually photosensitive materials, are patterned on the substrate through photo-lithography process.…”

Section: Introductionmentioning

confidence: 99%