Rapid Fabrication of Continuous Surface Fresnel Microlens Array by Femtosecond Laser Focal Field Engineering

Yan, Linyu; Yang, Dong; Gong, Qihuang; Li, Yudong

doi:10.3390/mi11020112

Cited by 22 publications

(11 citation statements)

References 28 publications

(33 reference statements)

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“…To improve fabrication speed, the fabrication was performed on the Y – Z plane and along the X ‐direction to have higher control of the structure height. [ 94 ]…”

Section: Single Micro‐optical Elementsmentioning

confidence: 99%

Micro‐Optics 3D Printed via Multi‐Photon Laser Lithography

Gonzalez‐Hernandez

Varapnickas

Bertoncini

et al. 2022

Advanced Optical Materials

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3D printed objects was first presented by Maruo in a technology-opening article in 1997, [2] where the use of this technology to fabricate micro-optics was also envisaged. The serial writing method of this technique offered flexibility for freeform fabrication, but was limited by its throughput. [3] It took some years for the technology to mature from proof-of-principle level to additive manufacturing as a tool for efficient and reliable fabrication in the modern lab. [4][5][6] Though the first micro-optical elements were demonstrated as early as 2006, [7] the major efforts and results only started to emerge in 2010, [8,9] together with the development of hybrid organic-inorganic materials, [10,11] and rapidly accelerated with the implementation of commercial 3D lithography systems. [12][13][14] By 2020, ultrafast laser 3D printing, also known as two-photon polymerization (TPP or 2PP), multiphoton lithography (MPL), [15][16][17] or simply laser direct writing (LDW), also in literature referenced as direct laser writing (DLW), [18] ) was already an established technique for routine fabrication of diverse micro-optical single elements, stacked components, and integrated devices. [19][20][21] The latest advances in the 3D printing of free-form micro-optics are enhanced by optical grade materials of high refractive index (n) polymers, [22] high-performance hybrids, [23] and optically active [24] or pure inorganic glasses. [25] Figure 1 shows the development of the technique in terms of published papers and citations, defining an "innovator stage" of the technology followed from 2015 by the "early adopters stage." Examples of micro-optical elements fabricated using MPL and the growth in the complexity of the structures that can be achieved by this technique are also shown in Figure 1.The advances in this scientific field attracted the attention of the related laser-assisted precision additive manufacturing industry. First, in 2007 Nanoscribe GmbH and in 2008 Workshop of Photonics established companies oriented toward commercialization of this technology aimed at general wide angle application fields. While in 2013, Multiphoton Optics GmbH and Femtika UAB were established and made micro-optics a significant part of their targeted applications. Finally, in 2017, Vanguard Photonics GmbH manufactured dedicated MPL equipment for micro-lenses and wire bond production. Other companies targeting more diverse applications have continued to emerge, such as UpNano established in 2018, and focusing mostly on biomedical applications yet also offering solutionsThe field of 3D micro-optics is rapidly expanding, and essential advances in femtosecond laser direct-write 3D multi-photon lithography (MPL, also known as two-photon or multi-photon polymerization) are being made. Micro-optics realized via MPL emerged a decade ago and the field has exploded during the last five years. Impressive findings have revealed its potential for beam shaping, advanced imaging, optical sensing, integrated photonic circuits, and much more. This is suppo...

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“…To improve fabrication speed, the fabrication was performed on the Y – Z plane and along the X ‐direction to have higher control of the structure height. [ 94 ]…”

Section: Single Micro‐optical Elementsmentioning

confidence: 99%

Micro‐Optics 3D Printed via Multi‐Photon Laser Lithography

Gonzalez‐Hernandez

Varapnickas

Bertoncini

et al. 2022

Advanced Optical Materials

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“…Owing to their attractive characteristics, FZPs have been widely used in various fields, including X-ray microscopy [3], optical trapping [4,5], pulse shaping [6], optical interconnections [7], optical imaging [8], and THz focusing [9]. To date, many methods have been developed to fabricate FZPs, such as photolithography [10], ion-beam and e-beam lithography [3,11], and femtosecond laser direct writing (FsLDW) [12][13][14][15]. However, most of these methods emphasize the use of photosensitive materials, which are generally disregarded in technical applications because of their fragile and unstable nature.…”

Section: Introductionmentioning

confidence: 99%

Phase-Type Fresnel Zone Plate with Multi-Wavelength Imaging Embedded in Fluoroaluminate Glass Fabricated via Ultraviolet Femtosecond Laser Lithography

Dai

Shi

et al. 2021

Micromachines

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Herein, we report a novel optical glass material, fluoroaluminate (AlF3) glass, with excellent optical transmittance from ultraviolet to infrared wavelength ranges, which provides more options for application in optical devices. Based on its performance, the phase-type Fresnel zone plate (FZP) by ultraviolet femtosecond (fs) laser-inscribed lithography is achieved, which induces the refractive index change by fs-laser tailoring. The realization of ultraviolet fs-laser fabrication inside glass can benefit from the excellent optical performance of the AlF3 glass. Compared with traditional surface-etching micro-optical elements, the phase-type FZP based on AlF3 glass exhibits a clear and well-defined geometry and presents perfect environmental suitability without surface roughness problems. Additionally, optical focusing and multi-wavelength imaging can be easily obtained. Phase-type FZP embedded in AlF3 glass has great potential applications in the imaging and focusing in glass-integrated photonics, especially for the ultraviolet wavelength range.

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“…Thus, in theory, the focusing ability obtained by discretestep pro le cannot be compared with that of the continuous pro le. The continuous pro le can be machined by laser direct writing and focused ion beam technology [6], but the pursuit of surface quality while maintaining a high machining e ciency in those processes has proven to be challenging. In general, most of these techniques require expensive equipment and involve complicated process steps, in addition, these processes are usually time consuming as well.…”

Section: Introductionmentioning

confidence: 99%

“…The focusing and imaging performance of diffractive lens depends on the form accuracy and surface nish of its feature. Many methods for the manufacture of diffractive lens arrays have been extensively investigated, including laser direct writing [5][6][7], focused ion beam [8], and photolithography [9]. By increasing the number of orders, the optical properties of the multiorder diffractive optical elements fabricated by lithography can be obviously improved.…”

Section: Introductionmentioning

confidence: 99%

Fabrication Large-scale Diffractive Lens Arrays on Chalcogenide Glass by Means of Step-and-Repeat Hot Imprinting and Non-Isothermal Glass Molding

Yang

Chen

Zhou

et al. 2021

Preprint

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In this study, a new cost-effective and high-precision process chain for the fabrication of large-scale diffractive lens arrays on chalcogenide glass is proposed. First, a positive diffractive lens array is fabricated on a PMMA master substrate by employing a step-and-repeat hot imprinting process. The direct hot imprinting can transfer the microstructures from a heated mold to the polymer substrate accurately. Repeating the hot imprinting process according to a predetermined path, the desired diffractive lens array is obtained. Unlike photolithography and electron-beam writing, which are expensive technologies with sophisticated process, the hot imprinting is an easier, cheaper and more eco-friendly method for fabricating diffractive features with continuous profile. Afterwards a casting process is applied to create a PDMS mold with the negative features. The diffractive lens array with continuous profile is successfully transferred from the master substrate to the PDMS elastomer, which is used as a mold for subsequent precision glass molding. Finally, the microstructures of PDMS mold are replicated to the chalcogenide glass by non-isothermal glass molding. In this process, the mold and workpiece are set at different temperatures. The PDMS mold at low temperature maintains enough rigidity, so as to press the features into the softened chalcogenide glass more easily, which is at relatively higher temperature, resulting in a positive high-fidelity diffractive lens array on the chalcogenide glass. Surface profiles and optical performance of the fabricated components are characterized quantitatively. Results showed that large-scale diffractive lens array with continuous profile can be successfully fabricated on Chalcogenide glass by this proposed process chain with high quality and integrity.

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Rapid Fabrication of Continuous Surface Fresnel Microlens Array by Femtosecond Laser Focal Field Engineering

Cited by 22 publications

References 28 publications

Micro‐Optics 3D Printed via Multi‐Photon Laser Lithography

Micro‐Optics 3D Printed via Multi‐Photon Laser Lithography

Phase-Type Fresnel Zone Plate with Multi-Wavelength Imaging Embedded in Fluoroaluminate Glass Fabricated via Ultraviolet Femtosecond Laser Lithography

Fabrication Large-scale Diffractive Lens Arrays on Chalcogenide Glass by Means of Step-and-Repeat Hot Imprinting and Non-Isothermal Glass Molding

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