“…The conventional electrical signal detection equipment, Keithley 2400 semiconductor parameter analyzer (Keithley Instruments Inc., OH, USA), despite its high sensitivity and accuracy, can only be obtained through manual user judgment based on common sense. 24 Due to the non-contact characteristic of the light response measurements, the light calibration method has the advantage of not polluting the SiNW-FET sensor. 25 Thus, light modulation was used to improve the uniformity of the SiNW-FET biosensor.…”