Rapid characterization of nano-scale structures in large-scale ultra-precision surfaces

Yang, Wenjun; Liu, Xiaojun; Chi, Hu; Lu, Wenlong; Cheng, Chen; Yao, Zhenjian; Lei, Zili

doi:10.1016/j.optlaseng.2020.106200

Cited by 7 publications

(1 citation statement)

References 27 publications

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“…A variety of metrology tools have been applied to characterizing thin-film structures including 2D materials, such as atomic force microscopy (AFM), scanning electron microscopy (SEM), Raman spectroscopy, and ellipsometry . Although AFM and SEM can provide high spatial resolution and measurement precision, they pose potential damage to a specimen and have an extremely low measurement throughput. , Raman spectroscopy/microscopy can be applied to distinguishing the number of layers of 2D materials , of limited types (e.g., multilayers of graphene sheets can hardly be differentiated), whereas the measurement speed is extremely low, especially when providing spatial mapping based on scanning. Imaging ellipsometry provides a contact-free mapping of 2D material thickness profiles, but the involved scanning of wavelengths or illumination angles and the high complexity in model fitting can potentially hinder the measurement throughput …”

Section: Introductionmentioning

confidence: 99%

Transmission-Matrix Quantitative Phase Profilometry for Accurate and Fast Thickness Mapping of 2D Materials

et al. 2023

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The physical properties of two-dimensional (2D) materials may drastically vary with their geometric thickness profiles. Current thickness profiling methods for 2D materials are limited in measurement throughput and accuracy. Here, we present a novel high-speed and high-precision thickness profiling method, termed transmission-matrix quantitative phase profilometry (TM-QPP). In TM-QPP, picometer-level optical pathlength sensitivity is enabled in both temporal and spatial domains by extending the photon shot-noise limit of a high-sensitivity common-path interferometric microscopy technique, while accurate thickness determination with ∼10 pm precision is realized by developing a transmission-matrix model that accounts for multiple refractions and reflections of light at sample interfaces. Using TM-QPP, the exact geometric thickness profiles of monolayer and few-layered 2D materials (e.g., MoS 2 , MoSe 2 , and WSe 2 ) are mapped over a wide field of view within seconds in a contact-free manner. Notably, TM-QPP is also capable of spatially resolving the number of layers of few-layered 2D materials.

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