Ranges of some 20–100 keV light ions in Si and Ge

Measurements of proton induced γ-ray emission cross sections on MgF2 target in the energy range 1.95–3.05MeV

“…In addition it is important to emphasize that resonance at 2.01 MeV is suitable for depth profiling of Mg since it is well-isolated with low off-resonance cross sections and narrow width. The use of this resonance for Mg depth profiling, with depth resolution of 3-5 nm for depths up to 20 lm, was demonstrated by Paltemaa et al [36] and Reddy et al [37]. As off-resonance cross sections at proton energies from 1.95 to 2.2 MeV were below detection limit, due to the very low peak to background ratio, detection limit values were displayed instead real cross section values (green points at Fig.…”