2019
DOI: 10.1063/1.5118296
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Random two-frame phase-shifting interferometry via minimization of coefficient of variation

Abstract: Random two-frame phase-shifting interferometry (PSI) is an advanced technique to retrieve the phase information from as few as two interferograms with unknown phase steps. Because of the advantages of no requirement for accurate phase shifters and much less time for data acquisition and processing, random two-frame PSI is attracting more and more interest in fast and high-precision optical metrology. However, reconstructing the phase from only two interferograms is challenging because it is an ill-posed proble… Show more

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Cited by 16 publications
(4 citation statements)
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“…For instance, high-resolution imaging techniques, such as phase-shifting interferometry (PSI), laser speckle angular measurement, and functional scanning force microscopy, provide detailed insights into the surface characteristics and dimensions of nanostructures and materials. Additionally, non-contact surface measurement methods, including infrared (IR) imaging and optical interferometric measurement, offer the advantage of capturing surface information without physically touching the sample, making them suitable for delicate or sensitive materials (Cheng et al, 2019;Wang et al, 2021;Chen et al, 2018;Tofail et al, 2018;Wu, 2020).…”
Section: Advanced Metrology Techniquesmentioning
confidence: 99%
“…For instance, high-resolution imaging techniques, such as phase-shifting interferometry (PSI), laser speckle angular measurement, and functional scanning force microscopy, provide detailed insights into the surface characteristics and dimensions of nanostructures and materials. Additionally, non-contact surface measurement methods, including infrared (IR) imaging and optical interferometric measurement, offer the advantage of capturing surface information without physically touching the sample, making them suitable for delicate or sensitive materials (Cheng et al, 2019;Wang et al, 2021;Chen et al, 2018;Tofail et al, 2018;Wu, 2020).…”
Section: Advanced Metrology Techniquesmentioning
confidence: 99%
“…( 1), two-frame interferograms with a size of 640×640 are created. For more generality, the background and the amplitude of two-frame interferograms are set as non-uniform terms, For illustrating the performance of ours, it is compared with the results of the PCA&LSI method [9] and CV method [10] in terms of phase reconstruction performance. The phase unwrapping method in this paper is referred to literature [11].…”
Section: Simulationmentioning
confidence: 99%
“…To better understand the relationships among the collected data, a descriptive statistical analysis was carried out, by computing several summarization metrics such as basic statistics, the coefficient of variation [64], Pearson correlation [65], and energy load histogram Q-Q plot [66].…”
Section: Knowledge Data Discovery (Kdd Analysis)mentioning
confidence: 99%