Raman-Scattering Spectroscopy of Epitaxial Graphene Formed on SiC Film on Si Substrate

Abstract

By conducting a 1200 • C vacuum annealing of a 3C-SiC(111) ultrathin film preformed on a Si(110) surface, we have succeeded in forming a graphene layer on a Si substrate. Raman-scattering spectrum from this surface presents a distinct 2D band, whose deconvolution into four subcomponents indicates that the film mostly consists of a two-layer graphene. The peak position is blue-shifted from that of a free-standing graphene formed by a mechanical exfoliation method, suggesting a compressive stress in the film.

Epitaxial graphene field-effect transistors on silicon substrates

“…Such an 'epitaxial graphene on Si substrates' could be possible if high-quality and appropriate crystal orientation of SiC is able to be grown on Si substrates. Using this approach, we demonstrated the first epitaxial graphene on Si substrates and confirmed few layers of graphene (FLG) were successfully formed [17,18]. In this paper, backgate field-effect transistors using the epitaxial graphene on Si substrates are demonstrated.…”

Observation of Amplified Stimulated Terahertz Emission from Optically Pumped Heteroepitaxial Graphene-on-Silicon Materials

“…The sample used in this experiment is heteroepitaxial graphene film grown on a 3C-SiC (110) thin film heteroepitaxially grown on a 300-μm thick Si(110) substrate via thermal graphitization of the SiC surface [17][18][19]. In the Raman spectrum of the graphene film, the principal bands of graphene, namely, the G (1595 cm −1 ) and G' (2730 cm −1 ) bands, are observed, as shown in Fig.…”

Emission of Terahertz Radiation from Two-Dimensional Electron Systems in Semiconductor Nano- and Hetero-Structures

“…The sample used in this experiment is heteroepitaxial graphene film grown on a SiC(110) thin film heteroepitaxially grown on a Si(110) substrate via thermal graphitization of the SiC surface [52][53][54]. In the Raman spectrum of the graphene film, the principal bands of graphene, namely, the G (1595 cm −1 ) and G′ (2730 cm −1 ) bands, are observed as shown in Fig.…”