1994
DOI: 10.1063/1.357385
|View full text |Cite
|
Sign up to set email alerts
|

Raman ‘‘fingerprinting’’ of amorphous carbon films

Abstract: We compare the Raman spectra and other macroscopic properties of nearly one hundred amorphous carbon films deposited at five research laboratories by a total of five different methods in search of correlations useful for both process control and basic understanding of the structure of these materials. For the full range of carbon-hydrogen alloys, including so-called ‘‘amorphous diamond,’’ hydrogenated ‘‘diamondlike’’ carbon, and plasma-polymers, a simple parametrization of the Raman spectrum in the usual 1000 … Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1
1
1
1

Citation Types

30
381
3

Year Published

1999
1999
2013
2013

Publication Types

Select...
6
3

Relationship

0
9

Authors

Journals

citations
Cited by 947 publications
(414 citation statements)
references
References 26 publications
30
381
3
Order By: Relevance
“…A correlation exists between the fraction of carbons in the sp 2 configuration and the optical gap. Figure 3 presents results from different workers who measured these two parameters for a-C:H samples (Jarman et al 1986;Kleber 1991;Tamor & Vassell 1994;Robertson 1996;Kassavetis et al 2007). The Dartois et al (2005) a-C:H sample is represented by the colored area: the sample optical gap is evaluated from its high degree of hydrogenation and low refractive index.…”
Section: Sp 2 /Sp 3 Ratio Determinationmentioning
confidence: 99%
See 1 more Smart Citation
“…A correlation exists between the fraction of carbons in the sp 2 configuration and the optical gap. Figure 3 presents results from different workers who measured these two parameters for a-C:H samples (Jarman et al 1986;Kleber 1991;Tamor & Vassell 1994;Robertson 1996;Kassavetis et al 2007). The Dartois et al (2005) a-C:H sample is represented by the colored area: the sample optical gap is evaluated from its high degree of hydrogenation and low refractive index.…”
Section: Sp 2 /Sp 3 Ratio Determinationmentioning
confidence: 99%
“…The external medium during this measurement, designed by the subscript 1, is the air. The quasi-monochromatic excitation (excitation FWHM < 10 nm) of the samples occurs at UV-visible wavelengths greater than 200 nm but quantitative measurements are Jarman et al 1986;Kleber 1991;Tamor & Vassell 1994;Robertson 1996;and Kassavetis et al 2007). The colored area corresponds to the Dartois et al (2005) a-C:H sample (see text for details).…”
Section: Photoluminescence Measurementsmentioning
confidence: 99%
“…The well-defined Raman peaks differentiate our thin films from amorphous C (a-C). 21 In fact, atomically thin a-C films have never been realized by CVD. 22 The G band centered at 1600 cm −1 and the 2D band at 2695 cm −1 are well resolved, which are signatures of sp 2 graphitic materials.…”
mentioning
confidence: 99%
“…In the spectrum taken from samples grown under condition II (Figure 4b, spectrum B) a strong luminescence is also noted. The presence of the luminescence band is likely due to small amounts of hydrogenated amorphous carbon [23] and has also been detected in other experiments of C deposition carried out employing high self-bias induced by RF [24]. Under such conditions the electrical field related to the negative self-bias is expected to interact with the hydrogen ions of the plasma, giving them a sufficient energy to induce an effective hydrogenation of the amorphous carbon produced during the CVD process.…”
Section: Resultsmentioning
confidence: 83%