Radio Frequency Microelectromechanical Systems in Defence and Aerospace

Sastry, D. V. K.

doi:10.14429/dsj.59.1561

Cited by 8 publications

(4 citation statements)

References 20 publications

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“…The experimental data suggest that the RF MEMS switch designed in the present study has lower impact speed, shorter closing time, and better electromagnetic performance. Among other methods to reduce the impact velocity, the charge drive of the constant current source is used in the literature [2] to reduce the impact velocity by 80%. The switching time increased by 182%.…”

Section: Discussionmentioning

confidence: 99%

“…Such advantages render RF MEMS switches an attractive alternative to PIN or FET RF switches [1]. RF MEMS switches are widely used in the fields of aerospace [2], radar [3], mobile communications [4], tunable filters [5], phase shift networks [6], and other notable fields. These switches must satisfy stringent reliability requirements of failure-free operation over billions of cycles.…”

Section: Introductionmentioning

confidence: 99%

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Design and Analysis of the Capacitive RF MEMS Switches with Support Pillars

Feng

Zhao

Zhou

et al. 2022

Sensors

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Conventional parallel capacitive RF MEMS switches have a large impact during the suction phase. In general, RF MEMS switches have to be switched on and off in a considerably fast manner. Increasing the driving voltage enables fast switching but also increases the impact force, which causes the beam membrane to be prone to failure. In the present study, the addition of two support pillars was proposed for slowing down the fall of the beam membrane based on the conventional RF MEMS parallel switch, so as to reduce the impact velocity. As such, a novel RF MEMS switch was designed. Further, simulation software was used to scan and analyze the positioning and height of the support pillars with respect to electromechanical and electromagnetic performance. The simulation results show that the optimal balance of impact velocity and pull-in time was achieved at a height of 0.8 um, a distance of 10 um from the signal line, and an applied voltage of 50 V. The impact velocity was reduced from 1.8 m/s to 1.1 m/s, decreasing by nearly 40%. The turn off time increased from 3.9 us to 4.2 us, representing an increase of only 0.05%. The insertion loss was less than 0.5 dB at 32 GHz, and the isolation was greater than 50 dB at 40 GHz.

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Section: Discussionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Design and Analysis of the Capacitive RF MEMS Switches with Support Pillars

Feng

Zhao

Zhou

et al. 2022

Sensors

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“…Among these devices, RF MEMS switches are exceptionally used in defence and space applications due to low power consumption, high isolation and low insertion losses [5,6]. In addition, these switches can be directly integrated with the RF sub-modules to achieve reconfigurability in their degree of functionality and characteristics [7]. Basically, the various devices such as filters, phase shifters, antennas are incorporated with the RF MEMS switches to reconfigure their characteristics by altering the structure and electrical length propagation and these are utilised for multipurpose applications.…”

Section: Introductionmentioning

confidence: 99%

Design and optimisation of a novel structure capacitive RF MEMS switch to integrate with an antenna to improve its performance parameters

Sravani

Guha²,

El-Sinawi³

2020

IET Circuits, Devices & Systems

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In this study, a step-down structured switch is designed and compared with and without optimised dimensions to increase the isolation and to lower the pull-in-voltage with respective electromechanical and electromagnetic characteristics. The optimised switch is designed to operate only in K-band frequencies with the high isolation of −54.17 dB at the centre frequency of 22 GHz. The antenna using MEMS switch exhibits a frequency shift of 1.5 GHz from the first case to the second case and 7.4 GHz in the third case due to change in radiating length of patch antenna operating at different ON/OFF combinations of switches whereas the antenna with PIN diode shifts the frequency approximately same, but the low isolation of PIN diode makes it less immune to noise.

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“…High performance and flexibility are key parameters to overcome the RF MEMS switches in defense and aerospace system application. In this switch, they consider gold as the beam material, and the actuation voltage is 47 V at 2 to 7‐GHz frequency . In this RF MEMS switch, actuation voltage is 50 V, and isolation is −30 dB at 8 to 12‐GHz frequency .…”

Section: Introductionmentioning

confidence: 99%

Beam and dielectric materials impact on improvement of the performance of a novel capacitive shunt RF MEMS switch

Sravani

Babu

Ramesh

et al. 2019

Int J Numerical Modelling

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This paper presents a novel radiofrequency micro‐electro‐mechanical systems (RF MEMS) shunt capacitive switch having high isolation and low insertion loss for microphone applications. The device optimization and various electromechanical analysis are performed using a finite element modeler (FEM) solver. The proposed switch results in a pull‐in voltage of 36.88 V to displace movable beam 2/3rd of its initial gap. By varying beam material, dielectric material, beam‐dielectric thickness, and air gap between movable beam and dielectric layer, various electromechanical and electromagnetic analyses are carried out. For better isolation, silicon nitride (Si3N4) is used for the dielectric layer than hafnium oxide (HfO2) and silicon carbide (SiC). To achieve maximum displacement of the beam, various materials such as aluminum, gold, nickel, and copper are chosen; among all, this gold shows high displacement because of its good conductivity. By implementing various meandering techniques along with perforations, pull‐in voltage and stiction problems are reduced. The switch exhibits good return loss of −28 dB and insertion loss of −0.017 dB during on‐state at 5 GHz and high isolation of −41.26 dB at 10.5 GHz during off‐state. The proposed switch is used at the subsystem/device level in the future microphone, aircraft navigation, and satellite applications.

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Radio Frequency Microelectromechanical Systems in Defence and Aerospace

Cited by 8 publications

References 20 publications

Design and Analysis of the Capacitive RF MEMS Switches with Support Pillars

Design and Analysis of the Capacitive RF MEMS Switches with Support Pillars

Design and optimisation of a novel structure capacitive RF MEMS switch to integrate with an antenna to improve its performance parameters

Beam and dielectric materials impact on improvement of the performance of a novel capacitive shunt RF MEMS switch

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