Radio frequency magnetron sputter deposition of CaF2 films

Dudney, Nancy J.

doi:10.1116/1.581092

Cited by 14 publications

(4 citation statements)

References 27 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…6. Macroscopic conductivity data reported for CaF 2 films, 14,24,25,27 CaF 2 nanopowders, 34,36 CaF 2 bulk samples, 8,13 and CaF 2 -Al 2 O 3 composites. [37][38][39] For films, the caption indicates whether the conductivity was measured in-plane (k) or through-plane (⊥).…”

Section: Discussionmentioning

confidence: 99%

“…26 Sputter-deposited CaF 2 films on Pt-coated Al 2 O 3 showed a similar through-plane conductivity. 27 A few earlier works observed hysteresis in electrical measurements with a sweeping voltage, which likely reflects the fact that ions are the predominant mobile charge carriers (see Ref. 28, and references cited therein).…”

Section: Introductionmentioning

confidence: 97%

“…This work presents that investigation with a focus on in-plane transport measurements, which are a standard method for probing interfacial effects in films 24,29,30 while avoiding problems with short circuiting that can arise in a through-plane geometry. 27…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Ion transport in nanocrystalline CaF2 films

Usiskin

Sigle

Kelsch

et al. 2021

Journal of Applied Physics

View full text Add to dashboard Cite

This work investigates the conductivity and structure of nanocrystalline CaF2 films grown at 200 °C by thermal evaporation. The in-plane conductivity is enhanced by several orders of magnitude compared to lightly doped bulk samples of CaF2, which independently confirms the finding of a previous work [Modine et al., J. Appl. Phys. 74, 2658 (1993)]. Upon heating above 200 °C, the enhancement is partially annealed out, and the activation energy increases continuously from 0.7 to 1.0 eV, which contradicts the annealing model proposed previously. The enhancement is seen only in an ∼20-nm thick region adjacent to the substrate, but this may be because the films show substantial porosity outside this region. A 5–10 nm grain size and a high density of grain boundaries are observed by high-resolution transmission electron microscopy. A 2–4 nm interfacial amorphous layer is seen in films grown on Al2O3, but such a layer is absent on MgO and evidently not responsible for the enhanced conduction. Overall, the evidence points to grain boundaries and/or dislocations as providing fast transport pathways. These results help to reconcile previous reports of enhanced ion transport in CaF2, and they are also relevant for understanding the enhancement mechanism in CaF2-based composites and antifluorite-structured materials such as Li2O.

show abstract

Section: Discussionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 97%

See 1 more Smart Citation

Ion transport in nanocrystalline CaF2 films

Usiskin

Sigle

Kelsch

et al. 2021

Journal of Applied Physics

View full text Add to dashboard Cite

show abstract

“…53 High optical quality CaF 2 layers can be grown easily by using magnetron sputtering at low temperatures (<100 C). 54 The whole multilayer structure is now congured as prism/Ag/ polyimide/(GaN/CaF 2 ) 15 /air. The polyimide layer can be removed easily by chemical etching.…”

Section: Sensor Design and Theoretical Analysismentioning

confidence: 99%

Hybrid Tamm plasmon resonance excitation towards a simple and efficient biomedical detector of NaI solution

et al. 2022

View full text Add to dashboard Cite

show abstract

Nanostructured CaF₂:Ln³⁺ (Ln³⁺ = Yb³⁺/Er³⁺, Yb³⁺/Tm³⁺) Thin Films: MOCVD Fabrication and Their Upconversion Properties

Pellegrino

Cortelletti

Pedroni

et al. 2017

Adv Materials Inter

View full text Add to dashboard Cite

it possible to collect the radiation energy outside the absorption range of the photoactive material (usually silicon) by shifting its energy to a more suitable optical region. In addition, rare-earth doped CaF 2 compounds are promising luminescent materials as phosphors and in technological applications as micro-and nanoscale thermometry for microelectronics and for biomedical assays. [4,[16][17][18] A comment deserves the CaF 2 structure, also in view of similar ionic size of the trivalent lanthanide ions, inserted as dopants, and the Ca 2+ ion. Calcium fluoride has the typical fluorite structure, following the name (fluorite) of the mineral form of CaF 2 , which is a simple cubic arrangement of anions with 50% cubic sites filled with Ca 2+ . Thus, in this structure, calcium is eight coordinated by fluoride ions, a coordination environment suitable for the lanthanide ions, being eight one of the most common coordination number for lanthanides. [19] Most of the above-mentioned applications require the calcium fluoride material in the form of thin films. Several studies are available on the deposition of CaF 2 thin films using physical vapor deposition techniques, such as sputtering, [20,21] electron beam evaporation, [22] pulsed laser deposition, [23,24] and molecular beam epitaxy. [25,26] Calcium fluoride films have also been deposited through sol-gel chemical routes using spin coating [27] or dip coating. [28] Among the chemical vapor deposition approaches, atomic layer deposition has been applied to the deposition of CaF 2 films. [29] Nevertheless, even though various deposition methods have been applied to the fabrication of CaF 2 films, a more versatile, easily scalable, fast, and industrially appealing approach is highly desirable.The metal organic chemical vapor deposition (MOCVD) has the potential advantage of being a very reliable and reproducible method for the fast production of films with high uniformity degree in both thickness and composition over large areas. In addition, note that in the case of potential integration of these layers in photovoltaic cell production, plasma-enhanced CVD is the most common fabrication method for thin film Si-based cells. [30] Calcium fluoride represents one of the most efficient hosts for up-conversion or down-conversion emissions. A simple metal organic chemical vapor deposition approach is applied to the fabrication of CaF 2 nanostructured thin films using the fluorinated "second-generation" β-diketonate compound Ca (hfa) 2 •diglyme•H 2 O as a Ca-F single-source precursor. The versatility of the process is demonstrated for the fabrication of up-converting Yb/Er or Yb/Tm codoped CaF 2 films on Si, quartz, and glass substrates. The Ln(hfa) 3 •diglyme (Ln = Tm, Er, Yb) precursors are used as sources of the doping ions. Structural, morphological, and compositional characterization of the films shows the formation of polycrystalline CaF 2 films with a very uniform surface and suitable doping. In fact, an appropriate tuning of the mixture composition, i.e., the Ca:Ln ...

show abstract

Radio frequency magnetron sputter deposition of CaF2 films

Cited by 14 publications

References 27 publications

Ion transport in nanocrystalline CaF2 films

Ion transport in nanocrystalline CaF2 films

Hybrid Tamm plasmon resonance excitation towards a simple and efficient biomedical detector of NaI solution

Nanostructured CaF₂:Ln³⁺ (Ln³⁺ = Yb³⁺/Er³⁺, Yb³⁺/Tm³⁺) Thin Films: MOCVD Fabrication and Their Upconversion Properties

Contact Info

Product

Resources

About

Radio frequency magnetron sputter deposition of CaF2 films

Cited by 14 publications

References 27 publications

Ion transport in nanocrystalline CaF2 films

Ion transport in nanocrystalline CaF2 films

Hybrid Tamm plasmon resonance excitation towards a simple and efficient biomedical detector of NaI solution

Nanostructured CaF2:Ln3+ (Ln3+ = Yb3+/Er3+, Yb3+/Tm3+) Thin Films: MOCVD Fabrication and Their Upconversion Properties

Contact Info

Product

Resources

About

Nanostructured CaF₂:Ln³⁺ (Ln³⁺ = Yb³⁺/Er³⁺, Yb³⁺/Tm³⁺) Thin Films: MOCVD Fabrication and Their Upconversion Properties