Radio-frequency electronegative gas discharge behaviour in a parallel-plate reactor for material processing

Elaissi, Samira; Yousfi, Mohammed; Helali, H.; Kazziz, S.; Charrada, K.; Sassi, Mohamed

doi:10.1080/10519990500493874

Cited by 6 publications

(2 citation statements)

References 21 publications

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“…, where s N is the number of gas species with densities s n permittivity of free-space. Furthermore, heavy particles are frequently assumed to be in thermodynamic equilibrium and macroscopic fluid equations with constant temperature g are taken into account for tracing the spatiotemporal behaviour of ions and neutral particles [12][13][14][15]. In contrast, the non-local kinetics of electrons plays an important role in the discharge mechanisms and the application range of fluid models which do not describe electrons adequately is very limited [16][17][18].…”

Section: Introductionmentioning

confidence: 99%

Derivation of Moment Equations for the Theoretical Description of Electrons in Nonthermal Plasmas

Becker¹,

Loffhagen²

2013

APM

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The derivation of moment equations for the theoretical description of electrons is of interest for modelling of gas discharge plasmas and semiconductor devices. Usually, certain artificial closure assumptions are applied in order to derive a closed system of moment equations from the electron Boltzmann equation. Here, a novel four-moment model for the description of electrons in nonthermal plasmas is derived by an expansion of the electron velocity distribution function in Legendre polynomials. The proposed system of partial differential equations is consistently closed by definition of transport coefficients that are determined by solving the electron Boltzmann equation and are then used in the fluid calculations as function of the mean electron energy. It is shown that the four-moment model can be simplified to a new drift-diffusion approximation for electrons without loss of accuracy, if the characteristic frequency of the electric field alteration in the discharge is small in comparison with the momentum dissipation frequency of the electrons. Results obtained by the proposed fluid models are compared to those of a conventional drift-diffusion approximation as well as to kinetic results using the example of low pressure argon plasmas. It is shown that the results provided by the new approaches are in good agreement with kinetic results and strongly improve the accuracy of fluid descriptions of gas discharges.

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Section: Introductionmentioning

confidence: 99%

Derivation of Moment Equations for the Theoretical Description of Electrons in Nonthermal Plasmas

Becker¹,

Loffhagen²

2013

APM

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“…The electron transport coefficients are calculated by solving the zero-dimensional Boltzmann equation by means of the collision cross-sections for electron-Ar and electron-O 2 systems. Ion transport coefficients are calculated with the Monte Carlo method that uses certain interaction potentials and collision cross-sections [31].…”

Section: Governing Equationsmentioning

confidence: 99%

Optimal Discharge Parameters for Biomedical Surface Sterilization in Radiofrequency AR/O2 Plasma

et al. 2022

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Plasma parameters of radiofrequency discharge generated at low pressures in an argon-oxygen mixture addressed for biomedical surface sterilization have been optimized. Numerical results illustrate the density distributions of different species and electron temperatures during the electrical discharge process. The current discharge acting in the abnormal range decreases at higher oxygen gas flow rates. The temperature of electrons drops with pressure while it rises by adding oxygen. Nevertheless, electron density displays an adverse trend, exhibited by the electron’s temperature. The average particle density of the reactive species is enhanced in Ar/O2 compared to He/O2, which ensures a better efficiency of Ar/O2 in sterilizing bacteria than He/O2. The impact of oxygen addition on the discharge mixture reveals raised oxygen atom density and a reduction in metastable oxygen atoms. A pronounced production of oxygen atoms is achieved at higher frequency domains. This makes our findings promising for biomedical surface sterilization and leads to optimal parameter discharges used for sterilization being at 30% of oxygen gas ratio and 0.3 Torr pressure.

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A stabilized finite element method for modeling of gas discharges

Becker

Loffhagen

Schmidt

2009

Computer Physics Communications

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Radio-frequency electronegative gas discharge behaviour in a parallel-plate reactor for material processing

Cited by 6 publications

References 21 publications

Derivation of Moment Equations for the Theoretical Description of Electrons in Nonthermal Plasmas

Derivation of Moment Equations for the Theoretical Description of Electrons in Nonthermal Plasmas

Optimal Discharge Parameters for Biomedical Surface Sterilization in Radiofrequency AR/O2 Plasma

A stabilized finite element method for modeling of gas discharges

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