Radiation-Induced Alteration of the Reflection Spectra of Diazoquinone–Novolac Photoresist Films by Implantation of Ag+ Ions

Kharchenko, A. A.; Brinkevich, D. I.; Brinkevich, S. D.; Prosolovich, V. S.

doi:10.1134/s0018143923060061

High Energy Chem

2023

DOI: 10.1134/s0018143923060061

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Radiation-Induced Alteration of the Reflection Spectra of Diazoquinone–Novolac Photoresist Films by Implantation of Ag+ Ions

A. A. Kharchenko,

D. I. Brinkevich,

S. D. Brinkevich

et al.

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Radiation-Induced Alteration of the Reflection Spectra of Diazoquinone–Novolac Photoresist Films by Implantation of Ag+ Ions

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References 14 publications

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