2022
DOI: 10.1088/1748-0221/17/04/c04034
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Radiation hardness and timing performance in MALTA monolithic pixel sensors in TowerJazz 180 nm

Abstract: The MALTA family of depleted monolithic pixel sensors produced in TowerJazz 180 nm CMOS technology target radiation hard applications for the HL-LHC and beyond. Several process modifications and front-end improvements have resulted in radiation hardness >1015 1 MeV neq/cm2 and time resolution below 2 ns, with uniform charge collection and efficiency across the pixel of size 36.4 × 36.4 µm2 with small collection electrode. This contribution will present the comparison of samples produced on high-resistivity … Show more

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Cited by 6 publications
(3 citation statements)
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“…While there is no realization that meets all our target specifications, Tower Semiconductor imaging technology is very promising. The ALICE collaboration along with the CERN WP1.2 have optimized such sensors in CMOS imaging 180 nm and 65 nm technologies over a decade [5,6], achieving a very low sensor capacitance in the order of a few fF, while maintaining a very good efficiency, even at high levels of irradiation up to 10 15 1 MeV 𝑛 eq /cm 2 . This technology also offers the possibility of wafer scale stitched sensors, which is the object of an R&D effort for the ITS3 upgrade [7].…”
Section: Technology Choicementioning
confidence: 99%
“…While there is no realization that meets all our target specifications, Tower Semiconductor imaging technology is very promising. The ALICE collaboration along with the CERN WP1.2 have optimized such sensors in CMOS imaging 180 nm and 65 nm technologies over a decade [5,6], achieving a very low sensor capacitance in the order of a few fF, while maintaining a very good efficiency, even at high levels of irradiation up to 10 15 1 MeV 𝑛 eq /cm 2 . This technology also offers the possibility of wafer scale stitched sensors, which is the object of an R&D effort for the ITS3 upgrade [7].…”
Section: Technology Choicementioning
confidence: 99%
“…The MALTA sensor bench tests include threshold and noise scan and hit occupancy studies with and without a 90 Sr source [10]. A new version of the MALTA sensor: MALTA2 [11] has been recently produced and characterized with beam tests at CERN. Better than 2 ns timing resolution has been obtained by the MALTA2 sensor.…”
Section: Eic Silicon Detector Technology and Randd Statusmentioning
confidence: 99%
“…The efficiency decrease can be understood through electric field strength simulation at the pixel boundaries. With increasing bias voltage -14 - STD, S2, 1E15 @ -50V STD, S3, 1E15 @ -50V NGAP, S2, 1E15 @ -50V NGAP, S3, 1E15 @ -50V XDPW, S2, 1E15 @ -50V XDPW, S3, 1E15 @ -50V Sensor efficiency for 1 × 10 15 n eq /cm 2 and 2 × 10 15 n eq /cm 2 irradiated epitaxial and Czochralski sensors with n − gap as a function of threshold [23].…”
Section: Jinst 18 P09018mentioning
confidence: 99%