Radiation effects on He+- and H+-implantation for ion slicing of rutile titanium dioxide thin film

Ma, Yujie; Lin, Senhua; Qiu, Yizhi; Zheng, Xiaoyan; Yu, M. Y.; Xiang, Bingxi; Fang, Xu; Lu, Fei; Zhou, C. T.; Ruan, Shuangchen

doi:10.1016/j.nimb.2022.10.013

Nuclear Instruments and Methods in Physics Research Section B:

2022

DOI: 10.1016/j.nimb.2022.10.013

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Radiation effects on He+- and H+-implantation for ion slicing of rutile titanium dioxide thin film

Yujie Ma¹,

Senhua Lin²,

Yizhi Qiu³

et al.

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Radiation effects on He+- and H+-implantation for ion slicing of rutile titanium dioxide thin film

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References 27 publications

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