2014
DOI: 10.1063/1.4900851
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Radiation and bias switch-induced charge dynamics in Al2O3-based metal-oxide-semiconductor structures

Abstract: Articles you may be interested inAn investigation of capacitance-voltage hysteresis in metal/high-k/In0.53Ga0.47As metal-oxide-semiconductor capacitors Charge trapping analysis of Al2O3 films deposited by atomic layer deposition using H2O or O3 as oxidant J. Vac. Sci. Technol. B 31, 01A101 (2013); 10.1116/1.4766182Effect of annealing ambient and temperature on the electrical characteristics of atomic layer deposition Al2O3/In0.53Ga0.47As metal-oxide-semiconductor capacitors and MOSFETs

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Cited by 5 publications
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“…This may be due to a SiO x interfacial layer which was frequently reported as a byproduct of layer growth via ALD on a Si substrate [18][19][20].…”
Section: Methodsmentioning
confidence: 99%
“…This may be due to a SiO x interfacial layer which was frequently reported as a byproduct of layer growth via ALD on a Si substrate [18][19][20].…”
Section: Methodsmentioning
confidence: 99%
“…Some oxides and complex oxides, such as TiO 2− x , ZnO 2 , NiO, TaO x , SrTiO 3 , Pr 0.7 Ca 0.3 MnO 3 , etc. [4,5,6,7,8,9,10,11,12,13,14,15], which have resistance switching characteristics, are under intense investigation due to their potential application in next-generation non-volatile memory [2,16]. In addition, the application of multiferroic materials has also gained great attention in resistance switching [17,18].…”
Section: Introductionmentioning
confidence: 99%