2000
DOI: 10.1063/1.1302528
|View full text |Cite
|
Sign up to set email alerts
|

Quench Module Insert (QMI) and the Diffusion Module Insert (DMI) furnace development

Abstract: DMI will be a Bridgman-Stockbarger furnace to study diffusion processes in semiconductors.The design for each insert, both QMI and DMI, is driven by specific science, operations and safety requirements, as well as by constraints arising from resource limitations, such as volume, mass and power. Preliminary QMI analysis and testing indicates that the design meets these requirements.

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...

Citation Types

0
0
0

Year Published

2019
2019
2019
2019

Publication Types

Select...
1

Relationship

0
1

Authors

Journals

citations
Cited by 1 publication
references
References 7 publications
(5 reference statements)
0
0
0
Order By: Relevance