Quaternary InP-based layers grown in the 12X4" multiwafer planetary

Schmitt, Thomas; Deufel, M.; Christiansen, K.; Hofeldt, J.; Marsan, Didier

doi:10.1109/iciprm.2004.1442780

16th IPRM. 2004 International Conference on Indium Phosphide and Related Materials, 2004.

DOI: 10.1109/iciprm.2004.1442780

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Quaternary InP-based layers grown in the 12X4" multiwafer planetary

Thomas Schmitt

M. Deufel

K. Christiansen

et al.

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Quaternary InP-based layers grown in the 12X4" multiwafer planetary

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