Quartz pressure sensor based on SAW reflective delay line

Scherr, H.; Scholl, Gerd; Seifert, F.; Weigel, Robert

doi:10.1109/ultsym.1996.583989

Cited by 73 publications

(35 citation statements)

References 6 publications

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“…For the last few decades, surface acoustic wave devices have been used not only for wireless communication systems [1], but also for gas [2][3][4], temperature and pressure sensors [5][6][7] due to their intrinsic energy confinement in a narrow region underneath the surface. Furthermore, the interest in tyre pressure monitoring systems (TPMS) for the automotive industry has increased in recent years.…”

Section: Introductionmentioning

confidence: 99%

High precision pressure sensors based on SAW devices in the GHz range

Rodríguez-Madrid

Iriarte

Williams

et al. 2013

Sensors and Actuators A: Physical

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In this paper, an AIN/free-standing nanocrystalline diamond (NCD) system is proposed in order to process high frequency surface acoustic wave (SAW) resonators for sensing applications. The main problem of synthetic diamond is its high surface roughness that worsens the sputtered AIN quality and hence the device response. In order to study the feasibility of this structure, AIN films from 150 nm up to 1200 nm thick have been deposited on free-standing NCD. We have then analysed the influence of the AIN layer thickness on its crystal quality and device response. Optimized thin films of 300 nm have been used to fabricate of one-port SAW resonators operating in the 10-14 GHz frequency range. A SAW based sensor pressure with a sensibility of 0.33 MHz/bar has been fabricated.

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Section: Introductionmentioning

confidence: 99%

High precision pressure sensors based on SAW devices in the GHz range

Rodríguez-Madrid

Iriarte

Williams

et al. 2013

Sensors and Actuators A: Physical

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“…The time delay shifts of the reflected peaks, τ, were observed. The phase shift Φ for each reflection peak was extracted by using Φ = 2πf 0 × τ. f 0 is the center frequency [7]. Depending on amount of applied mechanical force, the phase angle was modulated.…”

Section: Wireless Sensor Measurementmentioning

confidence: 99%

“…This value is better than other reported values for similar devices. Scherr et al reported a SAW pressure sensor with 2.67 • /kPa sensitivity and a linear region up to 250 kPa [7]. …”

Section: Wireless Sensor Measurementmentioning

confidence: 99%

Optimal design on SAW sensor for wireless pressure measurement based on reflective delay line

Wang

Lee

Woo

et al. 2007

Sensors and Actuators A: Physical

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“…Also, a voltagecontrolled oscillator is feasible [a]. An E L 0 film is com- physical quantities as temperature [11], [12], [13], torque [13], and pressure [14] has recently attracted much interest. The operation principle is shown in Fig.…”

Section: Application Of the Hybrid As A Remote Voltage Sensormentioning

confidence: 99%

Novel concepts for GaAs/LiNbO/sub 3/ layered systems and their device applications

Rotter¹,

Ruile

Scholl

et al. 2000

IEEE Trans. Ultrason., Ferroelect., Freq. Contr.

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Thin semiconductor quantum well structures fused onto LiNbO(3 ) substrates using the epitaxial lift-off (ELO) technology offer the possibility of controlling the surface acoustic wave (SAW) velocity via field effect. The tunability of the conductivity in the InGaAs quantum well results in a great change in SAW velocity, in general, accompanied by an attenuation. We show that an additional lateral modulation of the sheet conductivity reduces the SAW attenuation significantly, enhancing device performance. At high SAW intensity the bunching of electrons in the SAW potential also leads to a strong reduction of attenuation. These effects open new possibilities for voltage-controlled SAW devices. We demonstrate a novel, wireless, passive voltage sensor, which can be read out from a remote location.

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Quartz pressure sensor based on SAW reflective delay line

Cited by 73 publications

References 6 publications

High precision pressure sensors based on SAW devices in the GHz range

High precision pressure sensors based on SAW devices in the GHz range

Optimal design on SAW sensor for wireless pressure measurement based on reflective delay line

Novel concepts for GaAs/LiNbO/sub 3/ layered systems and their device applications

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