Quartz crystal microbalance gas sensor with nanocrystalline diamond sensitive layer

Varga, M.; Laposa, Alexandr; Kulha, Pavel; Kroutil, Jiří; Hušák, M.; Kromka, Alexander

doi:10.1002/pssb.201552229

Cited by 13 publications

(11 citation statements)

References 21 publications

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“…[85] The sensitivity of the QCM crystal is the highest in its center. [86] Frequency stabilization usually takes several minutes, and measurement of a full adsorption isotherm thus a few hours.…”

Section: Quartz Crystal Microbalance Gravimetrymentioning

confidence: 99%

Porosimetry for Thin Films of Metal–Organic Frameworks: A Comparison of Positron Annihilation Lifetime Spectroscopy and Adsorption‐Based Methods

et al. 2021

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separation and storage, or catalysis. [3][4][5] In addition, there is tremendous potential in the use of MOF thin films as membranes, active sensor coatings, high-performance dielectrics, and other microelectronic applications that could benefit from the integration of porous functional materials. [6] Routine characterization of MOF powders typically involves N 2 physisorption to investigate their porosity and specific surface area. [7] The characterization of MOF thin films is more challenging due to the low amount of material in sub-micrometer films (Table 1), especially compared to the mass and volume of the substrate (e.g., a Si wafer), and often requires dedicated methods and instruments. Therefore, often only qualitative porosity characterization has been performed, e.g., through intercalation of fluorescent dyes or other labels. [8,9] Thus far, quantitative porosimetry of MOF films has relied on physisorption, by measuring the adsorbed quantity of a probe molecule through manometric/volumetric (e.g., Kr physisorption, KrP), gravimetric (e.g., quartz crystal microbalance, QCM) or spectroscopic (e.g., ellipsometry, EP) methods. [10] When performed as a function of the adsorptive relative pressure at Thin films of crystalline and porous metal-organic frameworks (MOFs) have great potential in membranes, sensors, and microelectronic chips. While the morphology and crystallinity of MOF films can be evaluated using widely available techniques, characterizing their pore size, pore volume, and specific surface area is challenging due to the low amount of material and substrate effects. Positron annihilation lifetime spectroscopy (PALS) is introduced as a powerful method to obtain pore size information and depth profiling in MOF films. The complementarity of this approach to established physisorptionbased methods such as quartz crystal microbalance (QCM) gravimetry, ellipsometric porosimetry (EP), and Kr physisorption (KrP) is illustrated. This comprehensive discussion on MOF thin film porosimetry is supported by experimental data for thin films of ZIF-8.

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Section: Quartz Crystal Microbalance Gravimetrymentioning

confidence: 99%

Porosimetry for Thin Films of Metal–Organic Frameworks: A Comparison of Positron Annihilation Lifetime Spectroscopy and Adsorption‐Based Methods

et al. 2021

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“…The sensors under test were characterized using a custom-made apparatus, detailed information on its capabilities can be found in [6]. The test procedure has two fundamental phases: the purging and the detection phases.…”

Section: Measurement Setup and Resultsmentioning

confidence: 99%

Quartz Crystal Micro–Balance Gas Sensor with Ink–Jet Printed Nano–Diamond Sensitive Layer

Kulha

Kroutil

Laposa

et al. 2016

Journal of Electrical Engineering

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-the paper presents fabrication and characterization of a Quartz Crystal Microbalance based gas sensor with a diamond powder sensitive layer deposited using the ink-jet printing technique. The sensor was exposed to a low concentration of ammonia, acetone vapors and different levels of humidity. Impedance characteristics close to the natural resonant frequency of 10 MHz were examined. The sensor exhibits significant shifts in serial resonant frequency under different gas environments.

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“…Among them, the QCM-based gas sensor is very effective owing to its beneficial features including accuracy, high sensitivity, and fast response. Also, QCM can be easily integrated with other electronic components [15,16].…”

Section: Introductionmentioning

confidence: 99%

Copper Oxide/Functionalized Graphene Hybrid Nanostructures for Room Temperature Gas Sensing Applications

et al. 2022

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Oxide semiconductors are conventionally used as sensing materials in gas sensors, however, there are limitations on the detection of gases at room temperature (RT). In this work, a hybrid of copper oxide (CuO) with functionalized graphene (rGO) is proposed to achieve gas sensing at RT. The combination of a high surface area and the presence of many functional groups in the CuO/rGO hybrid material makes it highly sensitive for gas absorption and desorption. To prepare the hybrid material, a copper oxide suspension synthesized using a copper acetate precursor is added to a graphene oxide solution during its reduction using ascorbic acid. Material properties of the CuO/rGO hybrid and its drop-casted thin-films are investigated using Raman, FTIR, SEM, TEM, and four-point probe measurement systems. We found that the hybrid material was enriched with oxygen functional groups (OFGs) and defective sites, along with good electrical conductivity (Sheet resistance~1.5 kΩ/□). The fabricated QCM (quartz crystal microbalance) sensor with a thin layer of the CuO/rGO hybrid demonstrated a high sensing response which was twice the response of the rGO-based sensor for CO2 gas at RT. We believe that the CuO/rGO hybrid is highly suitable for existing and future gas sensors used for domestic and industrial safety.

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Quartz crystal microbalance gas sensor with nanocrystalline diamond sensitive layer

Cited by 13 publications

References 21 publications

Porosimetry for Thin Films of Metal–Organic Frameworks: A Comparison of Positron Annihilation Lifetime Spectroscopy and Adsorption‐Based Methods

Porosimetry for Thin Films of Metal–Organic Frameworks: A Comparison of Positron Annihilation Lifetime Spectroscopy and Adsorption‐Based Methods

Quartz Crystal Micro–Balance Gas Sensor with Ink–Jet Printed Nano–Diamond Sensitive Layer

Copper Oxide/Functionalized Graphene Hybrid Nanostructures for Room Temperature Gas Sensing Applications

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