Quartz crystal element for angular rate sensor

Matsudo, H.; Ishihara, M.; Kawasaki, S.; Yukawa, Junichi; Hatanaka, Masakazu

doi:10.1109/freq.2000.887335

Cited by 6 publications

(1 citation statement)

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“…4) We developed an angular rate sensor element with laminated quartz tuning fork to miniaturize a sensor element. [5][6][7] The laminated structure had simplified the detection electrode of a sensor element, which made it possible to miniaturize the sensor element with a quartz crystal tuning fork. We have developed the miniaturized angular rate sensor using an angular rate sensor element with a laminated quartz tuning fork and an advanced reliable assembly process technology.…”

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Miniaturized Angular Rate Sensor with Laminated Quartz Tuning Fork

Ohtsuka¹,

Inoue

Yoshimatsu

et al. 2006

jjap

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We have developed a miniaturized angular rate sensor (5:0 Â 3:2 Â 1:3 mm 3 ) with a laminated quartz tuning fork (3:7 Â 0:97 Â 0:24 mm 3 ). An advanced reliable assembly process technology was applied to the packaging of LSI and the sensor element of the small thin sensor. Therefore, the sensor had high quality and superior mass productivity. The characteristics of the angular rate sensor were evaluated and results sufficiently met the target of development for consumer angular rate sensor. We concluded that the sensor can be used for consumer products, such as digital still cameras and digital video cameras.

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confidence: 99%