Density functional theory was used
to investigate the reactivity
of partially chlorinated and stepped silicon surfaces with molecules
having N, O, and S head groups in relation to the development of selectively
functionalized surfaces. The activation energy barriers for the formation
of Si–N, Si–O, and Si–S bonds by breakage of
the Si–Cl bond are very sensitive to steric factors and this
fact can be used to tune the surface reactivity. Whereas the fully
chlorinated Si(111) surface has high energy barriers in the range
34–64 kcal/mol for the reactions with NH3, H2O, H2S, CH3NH2, CH3OH, and CH3SH molecules, the partially chlorinated surface
has much lower barriers in the range 13–34 kcal/mol, indicating
that some molecules may react at almost room temperature with the
SiCl groups. The reactions of these molecules on SiH groups have high
energy barriers for all surfaces (in the range 33–42 kcal/mol)
indicating that they form a matrix of unreactive groups around the
reactive SiCl sites. Unlike the fully chlorinated Si(111) surface,
the SiCl groups on the reconstructed step edges are very reactive,
showing the lowest activation energy barriers. The different reactivities
of SiCl groups on the terraces and step edges of fully chlorinated
stepped silicon surfaces may allow the formation of molecular lines
along the reactive step edges.