Quantitative surface topography determination by Nomarski reflection microscopy 2: Microscope modification, calibration, and planar sample experiments

Abstract

The application of reflective Nomarski differential interference contrast microscopy for the determination of quantitative sample topography data is presented. The discussion includes a review of key theoretical results presented previously plus the experimental implementation of the concepts using a commercial Nomarski microscope. The experimental work included the modification and characterization of a commercial microscope to allow its use for obtaining quantitative sample topography data. System usage for the measurement of slopes on flat planar samples is also discussed. The discussion has been designed to provide the theoretical basis, a physical insight, and a cookbook procedure for implementation to allow these results to be of value to both those interested in the microscope theory and its practical usage in the metallography laboratory.

Linear phase imaging using differential interference contrast microscopy

“…We note that a recently announced variant of DIC called total interference microscopy (Carl Zeiss, Germany) is designed to allow easy rotation of the shear angle. Combinations of DIC with multiple shear directions and phase shifting have been published previously (Hartman et al ., 1980; Shimada et al ., 1990; Preza et al ., 1998; Preza, 2000). However, in those papers a simpler phase shifting technique was applied that assumed a constant object amplitude.…”

Quantitative phase microscopy through differential interference imaging

“…Methods specifically for reflection DIC have also been developed. 17,18 Recent additions to these contributions include ͑1͒ an iterative phase estimation method developed for reflection DIC, which incorporates the use of an atomic force microscope; 19 ͑2͒ a method applying noniterative deconvolution, with an approximate MTF, to phase-modulated DIC images in the weak phase regime developed for generally shaped phase objects in reflection; 20 and ͑3͒ results from a quantitative method, employing phase-shifting techniques similar to those used in the method discussed here, showing that the Abel transform can be used to numerically integrate linear phase gradients of rotationally symmetric objects with high accuracy. 21,22 Alternative approaches to quantitative phase microscopy that do not rely on DIC microscopy include quantitative phase amplitude microscopy, 23 fast Fourier phase microscopy, 24 phase-dispersion microscopy, 25 spiral phase contrast microscopy, 26 optical coherence microscopy, 27 digital holographic microscopy, 28,29 structured illumination phase microscopy, 30 and scanning transmission microscopy with a position sensitive detector.…”

Automated variable wavelength interferometry in reflected light mode

“…The movements of the monochromator grating and the Birefringent prism are supported by stepper motors and controlled by the computer. The DIC technique has been originally invented by Georges Nomarski [13][14] for visualization of phase (transparent) objects and inspection surface topography 15,16 . What makes DIC technique significant is a relief appearance or shadowcast effect (Fig.…”