1996
DOI: 10.1116/1.579965
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Quantitative surface composition analysis using very high intensity nonresonant multiphoton ionization

Abstract: The subject of this article is quantitative surface and material analysis under high sensitivity conditions. Various gases and one solid sample were studied, using high intensity (1014–1015 W/cm2), nonresonant multiphoton postionization in tandem with time-of-flight mass spectrometry. These atomic and molecular gases (Ar, Kr, NO, Xe, N2 and O2) possess high ionization potentials, requiring high photon flux density for ionization saturation. The solid sample SiO2, studied using 5 keV Ar+ sputtering, places a st… Show more

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Cited by 8 publications
(7 citation statements)
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“…Higher postionization irradiance can be obtained by further reducing laser spot. However, mass discrimination of ablated atoms with different motion velocities and, therefore, low mass resolution by the space charge effect in such a small postionization volume cannot be neglected . The larger postionization area is adopted, the more alleviative elemental fractionation is acquired.…”
Section: Methodsmentioning
confidence: 99%
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“…Higher postionization irradiance can be obtained by further reducing laser spot. However, mass discrimination of ablated atoms with different motion velocities and, therefore, low mass resolution by the space charge effect in such a small postionization volume cannot be neglected . The larger postionization area is adopted, the more alleviative elemental fractionation is acquired.…”
Section: Methodsmentioning
confidence: 99%
“…Signal-to-noise ratio (SNR) is calculated by the ratio between peak intensities and 3σ values. a LOD of 57 Fe is chosen to calculate LOD for Fe rather than 54 Fe in GBW 921b due to the saturation of 56 Fe signal and 27 Al 2 + interference peak.…”
Section: Improved Detection Sensitivity Of Elements In Standard Allmentioning
confidence: 99%
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“…Furthermore, in a very small ionization volume, poor spectral resolution derived from the space charge effect can be inevitable. 40,41 There is a trade-off in implementing desirable sensitivity and reasonable spectral resolution. Thus, a focused spot size of ∼500 μm in diameter was utilized for "capturing" neutral atoms.…”
Section: ■ Experimental Sectionmentioning
confidence: 99%
“…For quantitative surface and material analysis, Becker and He et al [19][20][21][22] have studied some gases (Ar, Kr, NO, Xe, N 2 , and O 2 ) and solid samples (SiO 2 , GaAs, SiC and C1154 alloy) using a high intensity (10 14 -10 15 Wcm À2 ) 35 ps laser at 532 nm with time-of-flight mass spectrometry. The results, with the relative sensitivity factors (RSFs) close to unity, showed that the saturation of the multiphoton ionisation and uniform ionisation yields were achieved even for species with different ionisation potentials.…”
mentioning
confidence: 99%