European Microscopy Congress 2016: Proceedings 2016
DOI: 10.1002/9783527808465.emc2016.6260
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Quantitative Stage Mapping of a Zircon grain by WDS on an SEM

Abstract: Because of the effects of Bragg defocusing, accurate quantitative analysis by WDS can only be done with the electron beam in “spot mode” and with samples at the proper analytical working distance. As a result, WDS X‐ray mapping in the SEM has only achieved simple raw counts mapping of a single element by rastering the beam over the sample. More complicated WDS X‐ray mapping (quantitative or otherwise) has been relegated to the electron microprobe. However, modern SEMs and WDS systems permit quantitative WDS ma… Show more

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