Abstract:Because of the effects of Bragg defocusing, accurate quantitative analysis by WDS can only be done with the electron beam in “spot mode” and with samples at the proper analytical working distance. As a result, WDS X‐ray mapping in the SEM has only achieved simple raw counts mapping of a single element by rastering the beam over the sample. More complicated WDS X‐ray mapping (quantitative or otherwise) has been relegated to the electron microprobe. However, modern SEMs and WDS systems permit quantitative WDS ma… Show more
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.