“…For metal-oxide-semiconductor (MOS) device scaling, a traditional architecture, with planar bulk substrates and highly doped channels for short-channel-effect (SCE) control, is problematic due to excessive leakage currents. 7 To overcome this, thin-body architectures are being considered which operate in partially depleted, fully depleted, or accumulation mode. 8 Due to the narrow bandgap of Ge leading to worse diode leakage than in Si, 9 it is realistic to assume that if Ge is to be used in future MOS technologies, it will be in the thin-body form.…”