Quantitative electron probe microanalysis :

“…,27 Based on published BSE data for a large number of pure elements, numerous authors have proposed equations to relate g to atomic number Z 16,[28][29][30][31]. While these various equations give similar data for mid to high values of Z, only Arnal et al…”

mentioning

confidence: 98%

Tunable glass reference materials for quantitative backscattered electron imaging of mineralized tissues

Campbell

Geiss²,

Feller

et al. 2012

J. Mater. Res.

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Backscattered electron microscopy provides gray-level contrast resulting from variations in atomic composition. Through the use of reference materials, quantitative backscattered electron (qBSE) imaging can be used to measure the mineral content of mineralized tissues at submicron resolution. We have developed novel tunable reference materials that can be adjusted for analysis of an individual tissue or a wide range of tissues with variable atomic density. As an alternative to conventional metallic reference materials, these amorphous materials maintain long-term stability and possess no long-range order that may induce channeling contrast. Using these reference materials, we characterized the mineral content of a broad range of mineralized tissues from immature mouse femur to whale bulla. Mineral volume fraction correlated to more traditional measurements of mineral content with microcomputed tomography and ashing techniques. Further, we demonstrate the advantage of location-matched measurements of nanomechanical properties and qBSE mineral content.

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“…The ZAF technique (Goldstein et al, 1981d;Heinrich, 1981e;Henoc and Maurice, 1979b), as summarized thus far, applies to both EDS and WDS. The only calculation difference between the two detection methods is that a curve-fitting scheme is applied to the EDS spectrum prior to obtaining the k-ratio in order to properly subtract the background and isolate any overlapping peaks.…”

Section: Thin Film On Substratementioning

confidence: 99%

“…The basic assumptions made by ZAF, for either EDS or WDS, are that the electron beam is normal to the sample's surface and that the k-ratio is measured from an X-ray generation volume that is entirely contained within a homogeneous material. If the standard and sample are both tilted to the same tilt angle, the k-ratios need to be corrected for the tilt angle before ZAF can correct it properly (Goldstein et al, 1981c;Heinrich, 19810. It is desirable to measure the X-ray K-lines when possible as they are not absorbed as strongly as the low energy L or M-lines. However, often there is a compromise between the required beam energy to perform a bulk analysis on a thin film on a substrate and the energy required to excite the K-line.…”

Section: Thin Film On Substratementioning

confidence: 99%

Quantitative EDS and WDS X‐ray microanalysis of semiconductor materials: Principles and comparisons

Herrington

1985

J. Elec. Microsc. Tech.

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The basic principles and procedures for performing accurate X-ray microanalyses on semiconductor materials as well as the differences and advantages of EDS (energy-dispersive spectroscopy) and WDS (wavelengthdispersive spectroscopy) are presented. Many of the techniques discussed are the result of extensive experience with some photovoltaic materials such as CuInSe2, GaAs, CdTe, CdS, CdSnP, Id?, ZnP, and amorphous Si-based alloys.Results of an experiment designed to compare the performance of an energydispersive X-ray spectrometer (EDS) and a wavelength-dispersive X-ray spectrometer (WDS) on some semiconductor materials are presented. CdTe, CdSe, CuInSez, ZnSe, and InSb standards were used to measure the k-ratios with pure element standards employing both types of X-ray spectrometers to demonstrate the ability of each to measure elemental compositions under various operating conditions. Both types of spectrometers were utilized on a Cameca MBX electron microprobe at identical X-ray take-off angles.The EDS spectrometer was found t o perform equal to the WDS spectrometer when integral peak-to-background ratios were greater than seven, when the X-ray line being measured was greater than about 1,000 eV, and when adjacent peaks were separated by more than three times the detector energy resolution.

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Quantitative electron probe microanalysis :

Cited by 26 publications

References 0 publications

Uncertainty in quantitative electron probe microanalysis

Uncertainty in quantitative electron probe microanalysis

Tunable glass reference materials for quantitative backscattered electron imaging of mineralized tissues

Quantitative EDS and WDS X‐ray microanalysis of semiconductor materials: Principles and comparisons

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