2013
DOI: 10.1017/s1551929513000515
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Quantitative Analysis and High-Resolution X-ray Mapping with a Field Emission Electron Microprobe

Abstract: The electron probe microanalyzer (EPMA) provides quantitative analysis for nearly all chemical elements with a spatial resolution of analysis about ~1 μm, which is relevant to microstructures in a wide variety of materials and mineral specimens. Recent implementation of the Schottky emitter field-emission gun (FEG) electron source in the EPMA has significantly improved the spatial resolution and detectability of the EPMA technique.

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Cited by 17 publications
(7 citation statements)
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“…WISC-Resolution output for hemispherical Cu-Mg-Pd precipitates in Mg-Pd. The scaled PENEPMA simulation, performed at 6 kV, matches well the experimental data of Hombourger and Outrequin[4].…”
supporting
confidence: 68%
See 1 more Smart Citation
“…WISC-Resolution output for hemispherical Cu-Mg-Pd precipitates in Mg-Pd. The scaled PENEPMA simulation, performed at 6 kV, matches well the experimental data of Hombourger and Outrequin[4].…”
supporting
confidence: 68%
“…We have tested the program on one published example [4], small Cu-Mg-Pd precipitates in a Mg-Pd matrix at 6 keV. For this sample, the calculated analytical resolution, in radius, for the element Mg (Kα line; 1.254 keV), Pd (Lα line; 2.838 keV) and Cu (Lα line; 0.928 keV) are ~0.35-.4 µm, ~0.35-.4 µm and ~0.35-.4 µm, respectively.…”
mentioning
confidence: 99%
“…In the present study, this analytical method was adopted for the fine-scale structures and tiny minerals in the Hiawatha melt grains. We reduced the acceleration voltage of the primary electron beam to 12 kV to reduce the interaction volume (Hombourger and Outrequin, 2013;McSwiggen, 2014;Fournelle et. al., 2016) and thus minimize the amount of mixed pixel data, and we used a 60 µm aperture with a low beam current.…”
Section: Discussionmentioning
confidence: 99%
“…The mineral classifications could be used on particles down to 200 nm, even though the interaction volume of the beam was larger than 200 nm. Therefore, the obtained resolution of the To analyze the fine-grained fault gouge, we reduced the acceleration voltage of the primary electron beam to 10 kV to reduce the interaction volume [15][16][17], and therefore to minimize the amount of mixed pixel data, and used the 60-µm aperture providing a 1.8-nA beam current. Despite this reduction of primary electron energy to 10 kV, the interaction volume still has a diameter of up to approximately 1 µm for minerals with the lowest average atomic number (Z) and down to 400 nm for a high Z phase on top of a low Z phase (Figure 3).…”
Section: Methodsmentioning
confidence: 99%