Quantifying the Impact of Al Deposition Method on Underlying Al2O3/Si Interface Quality
Iris Mack,
Kawa Rosta,
Ulviyya Quliyeva
et al.
Abstract:Oxide‐semiconductor interface quality has often a direct impact on the electrical properties of devices and on their performance. Traditionally, the properties are characterised through metal‐oxide‐semiconductor (MOS) structures by depositing a metal layer and measuring the capacitance‐voltage (C‐V) characteristics. However, metal deposition process itself may have an impact on the oxide and the oxide‐semiconductor interface. The impact of magnetron sputtering, e‐beam evaporation, and thermal evaporation on an… Show more
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