Quantifying operational time variability: the missing parameter for cycle time reduction

Jacobs, J.H.; Etman, L.F.P.; Rooda, J.E.; Campen, E.J.J. Van

doi:10.1109/asmc.2001.925605

Cited by 16 publications

(14 citation statements)

References 3 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…A common methodology for this type of global metrics is found in lithography layers per stepper per day [26]. Jacobs stated that by reducing bottleneck process stagnation contributes greatly to the reduction of cycle time [28]. Both Dietrich and Maynard further this concept by stating the solution of a bottleneck is not simply tool redundancy, but rather lie in tool and facility understanding [14], [38].…”

Section: Hvsf Global Metricsmentioning

confidence: 98%

Towards a metric management approach for multi-emerging technology based fabrication facilities

Tierney

Walsh

2009

PICMET '09 - 2009 Portland International Conference on Management of Engineering &Amp; Technology

View full text Add to dashboard Cite

Multi Technology, High Product Mix, Low Volume fabrication facilities (MT-HMLV) are the harbingers of next generation economies. Yet MT-HMLV's are fraught with ineffective operation and strategic management practice. Practices they often borrow from the metric management approach endemic of single technology high volume production facilities. If this is true in a time of recession and increased globalization then these facilities are at risk.We focus on one very important group of these facilities; those which are working at the interface of micro technology, nanotechnology and semiconductor micro fabrication. This group is not atypical. Due to the high degree of success that the metrics management approach has enjoyed in High Volume Semiconductor Fabrication facilities (HVSF) they are the "Defacto" standard for any fabrication facility remotely akin to semiconductor fabrication and this group is. However, simply applying HVSF based metrics to our group of MT-HMLV facilities are proving ineffectual. We employ an extensive literature review and the case study methods to ascertain why these commonly used metrics have been so ineffectual. Further, we utilize these same techniques to develop a more useful metrics management approach for our specific group of MT-HMLV's facilities. We base our metrics on the unique nature of MT-HMLV facilities as well as traditionally used HVSF metrics and R&D metrics.

show abstract

Section: Hvsf Global Metricsmentioning

confidence: 98%

Towards a metric management approach for multi-emerging technology based fabrication facilities

Tierney

Walsh

2009

PICMET '09 - 2009 Portland International Conference on Management of Engineering &Amp; Technology

View full text Add to dashboard Cite

show abstract

“…The definition of EPT as it is used throughout this paper is as follows: the EPT of a lot is the total amount of time a lot exploits capacity from a system, until it is processed as a qualified lot [12], [13].…”

Section: ) No Distinction Is Made Between Different Metrologymentioning

confidence: 99%

Performance of Workstation With Offline and Integrated Metrology

Ron¹,

Rooda²

2007

IEEE Trans. Semicond. Manufact.

View full text Add to dashboard Cite

One of the present developments in the semiconductor industry is integration of metrology tools in the main process tool, instead of measuring wafers stand-alone, i.e., at an offline metrology tool. One of the advantages expected from integrated metrology (IM) compared to offline metrology (OM) is an earlier detection of out-of-control situations in the process tool. Despite of the advantages expected from IM, manufacturers will only convert to IM if investments can be justified. The objective of this paper is to compare the effect of process failures in the processes on the performance of a workstation using OM or IM. Analytical relations for effective process time and flow time of a workstation, containing a single machine or a cascade machine, are derived and validated for both OM and IM.In the analysis, the performance of OM and IM practices are compared and the influence of process failures is investigated. It can be concluded that a workstation containing a single machine or a cascade machine with IM outperforms a workstation with OM with respect to flow time for lower levels of utilization. For higher levels of utilization the effective (maximal achievable) throughput of a workstation with IM is limited because of the increase of the process time by the quality measurement time. If the frequency of process failures is reduced by improving the workstation, a better performance of a workstation with OM is obtained with respect to flow time and throughput at higher utilization levels. In all situations, a workstation with OM and no transport time (inline metrology) has the best flow time performance.The opinion in industry that IM has a positive influence on flow time performance is not shared by the results of this paper. The results are obtained, e.g., by making no distinction between different metrology inspections or by neglecting the influence of a metrology module upon the reliability of the workstation. In practice, metrology configurations may not perform equally so that a preference for one of them might be based on other considerations than flow time performance.

show abstract

“…In [Sattler, 1996] it was also noticed that this definition of effective process time is difficult to measure. Instead of taking the bottom-up view of [Hopp and Spearman, 2000], a top-down approach can also be taken, as shown in [Jacobs et al, 2001, Jacobs et al, 2003, where algorithms have been introduced that enable determination of effective process time realizations from a list of events. That is, instead of measuring each source of disturbances individually and derive an aggregate effective process time distribution, one can also derive this effective process time distribution from manufacturing data directly.…”

Section: Effective Process Timesmentioning

confidence: 99%

Aggregate Modeling of Manufacturing Systems

Lefeber

Armbruster²

2010

International Series in Operations Research &Amp; Management Science

View full text Add to dashboard Cite

In this report we will present three approaches to model manufacturing systems in an aggregate way leading to fast and effective (i.e., scalable) simulations that allow the development of simulation tools for rapid exploration of different production scenarios in a factory as well as in a whole supply chain. We will present the main ideas and show some validation studies. Fundamental references are given for more detailed studies.

show abstract

Quantifying operational time variability: the missing parameter for cycle time reduction

Cited by 16 publications

References 3 publications

Towards a metric management approach for multi-emerging technology based fabrication facilities

Towards a metric management approach for multi-emerging technology based fabrication facilities

Performance of Workstation With Offline and Integrated Metrology

Aggregate Modeling of Manufacturing Systems

Contact Info

Product

Resources

About