Quantified X-Ray Mapping in the WDS Mode

Abstract

In material science, there is an increased demand for mapping of microstructural components and their composition. EPMA (Electron Probe Micro Analysis) with WDS (Wavelength Dispersive Spectrometry) is known as having high spectral resolution and sensitivity, but in practice considered to be slow in mapping applications. The present work describes a development of EPMA including design of both instrumental hardware and software related to electronics and calibration.