2020
DOI: 10.1002/pssa.202000212
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Quantification of Sodium‐Ion Migration in Silicon Nitride by Flatband‐Potential Monitoring at Device‐Operating Temperatures

Abstract: A trap‐corrected bias–temperature–stress (TraC‐BTS) method to quantify the kinetics of ion migration in dielectrics based on capacitance–voltage measurements is presented. The method is based on the extraction of flatband potential (Vfb) shifts in metal–insulator–semiconductor test structures an enables the reliability assessment of semiconductor dielectrics and solar cells. Herein, it is shown that carrier trapping in the dielectric must be accounted for, as it strongly affects the measurement of flatband pot… Show more

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Cited by 2 publications
(9 citation statements)
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“…As expected from the boundary conditions, we do not see depletion at the metal gate interface, in contrast to the closed system described in Section 4.1. We observe that, when t < τ c , the numerical solution behaves identically to the approximation at short times given by the analytical solution to a pure diffusion problem with a moving reference frame, [ 47 ] C ( x , t ) = C normals 2 B [ erfc ( x μ E t 2 D t ) + erfc ( x 2 L + μ E t 2 D t ) ] …”
Section: Resultsmentioning
confidence: 91%
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“…As expected from the boundary conditions, we do not see depletion at the metal gate interface, in contrast to the closed system described in Section 4.1. We observe that, when t < τ c , the numerical solution behaves identically to the approximation at short times given by the analytical solution to a pure diffusion problem with a moving reference frame, [ 47 ] C ( x , t ) = C normals 2 B [ erfc ( x μ E t 2 D t ) + erfc ( x 2 L + μ E t 2 D t ) ] …”
Section: Resultsmentioning
confidence: 91%
“…The corresponding concentration profiles as a function of time are shown in Figure 3 , where the drift‐diffusion time is indicated in color scale. Figures 3a,b illustrate the transport kinetics at short times as modeled using the analytical approximation described by Gastrow et al [ 47 ] Figures 3c,d show the numerical solution to PNP coupled system with a constant source and a closed boundary at the semiconductor interface. The characteristic length for electric field assisted diffusion is given by the diffusion length plus the distance the ions move due to drift L normalc = 2 D t + μ E t …”
Section: Resultsmentioning
confidence: 99%
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