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2020
DOI: 10.1088/1361-6463/ab89cd
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Quantification of dominant diffusion processes through plasma enhanced chemical vapor deposition-coated plastics by combining two complementary methods for porosity analysis

Abstract: Thin plasma polymerized gas barrier coatings were applied on PET films using low-pressure microwave excited hexamethyldisiloxane plasma. Oxygen and water vapor transmission rates were determined for the same barrier coating of varying thickness and correlated with the coating porosity. The porosity was quantified on different scales with two complementary methods. A plasma etching process with subsequent high-resolution SEM imaging and an automated defect detection as well as an overall porosity measurement by… Show more

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Cited by 6 publications
(30 citation statements)
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“…Often, the changes in the pore size also includes the surface pores and thus the surface roughness. Figure 7 shows the changes in the surface morphology of membranes upon variation in the CVD deposition time upon which not only the changes in pore size but also in thickness were noticeable 192 . Figure 6 (c) exhibits the effect of deposition time on contact angle.…”
Section: Cvd Process Parameters Selection and Controlmentioning
confidence: 99%
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“…Often, the changes in the pore size also includes the surface pores and thus the surface roughness. Figure 7 shows the changes in the surface morphology of membranes upon variation in the CVD deposition time upon which not only the changes in pore size but also in thickness were noticeable 192 . Figure 6 (c) exhibits the effect of deposition time on contact angle.…”
Section: Cvd Process Parameters Selection and Controlmentioning
confidence: 99%
“…Further reduction in He permeability up to ~25% was possible but required stacking five layers of graphene deposition. In another attempt, Wilski et al 192 employed low pressure PECVD to coat silica on a PET film. Their best membrane showed 96% and 92% decrease in oxygen and water vapor transmission rates, respectively, compared to the neat PET.…”
Section: Progress In Applications Of Cvd‐based Thin Films and Membranesmentioning
confidence: 99%
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