Qualification of local advanced cryogenic cleaning technology for 14nm photomask fabrication

Taumer, Ralf; Krome, Thorsten; Bowers, C.; Varghese, Ivin; Hopkins, Tyler; White, Roy; Brunner, Martin; Yi, Daniel

doi:10.1117/12.2074473

Cited by 2 publications

(2 citation statements)

References 3 publications

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“…As discovered, these methods proved to be viable but have also some limitations, related to the rapid decrease of the local temperature and the mechanical strength of the jet which can contribute to the surface damage of the more sensitive materials [25]. To minimize the potential damage, the less aggressive cleaning conditions with lower but still acceptable efficiency of particle removal could be used [30]. Therefore, to avoid possible physical damage, tests are needed prior to the application of any of these methods.…”

Section: Introductionmentioning

confidence: 99%

Carbon dioxide snow cleaning of paper

et al. 2021

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The cleaning of particles from smooth and rough paper surfaces using a high-speed CO2 snow jet was investigated. The measurements included characterization of the jet properties, determination of the cleaning efficiency, and evaluation of any possible adverse effects. The method was compared with nitrogen jet cleaning and dry cleaning by commercial materials. The results showed that the CO2 snow jet is able to effectively remove particles from the paper surface and did not cause any observable degradation. The CO2 snow jet cleaning compared with the mechanical dry cleaning showed similar effectiveness without any adverse effects on the paper surface. It was proved that the CO2 snow technique is a suitable method for cleaning common types of paper materials.

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Section: Introductionmentioning

confidence: 99%

Carbon dioxide snow cleaning of paper

et al. 2021

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show abstract

“…As found these methods proved to be viable but have also some limitations, related to the fast decrease of the local temperature and the mechanical strength of the jet which can contribute to the surface damage of the more sensitive materials [24]. To minimize the potential damage the less agressive cleaning conditions with lower but still acceptable efficiency of particle removal could be used [26].…”

Section: Introductionmentioning

confidence: 99%

Carbon Dioxide Snow Cleaning of Paper

Maskova

Smolik

Vávřová

et al. 2021

Preprint

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Cleaning of particles from smooth and rough paper surfaces was investigated using a high-speed CO2 snow jet. The measurements included characterization of the jet properties, determination of the cleaning efficiency, and evaluation of the possible adverse effects. The method was compared with the nitrogen jet cleaning and the dry cleaning by commercial materials. The results showed that the CO2 snow jet is able to effectively remove particles from the paper surface and did not cause any observable degradation. The CO2 snow jet cleaning compared with the mechanical dry cleaning showed similar effectiveness without any adverse effects on the paper surface. It was proved that the CO2 snow technique is a suitable method for cleaning of common types of paper materials.

show abstract

Qualification of local advanced cryogenic cleaning technology for 14nm photomask fabrication

Cited by 2 publications

References 3 publications

Carbon dioxide snow cleaning of paper

Carbon dioxide snow cleaning of paper

Carbon Dioxide Snow Cleaning of Paper

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