PZT thick films by diol chemical solution deposition

Abstract

Process optimization and properties of lead zirconate titanate (PZT) films for piezoelectric micromachined ultrasonic transducers (pMUTs) for scanning probe devices will be presented. The goal of the work was a replacement of the tetragenic and mutagenic solvent and a decrease of timeconsuming PZT 2-methoxy ethanol (2MOE) route. An alternative diol-based solution synthesis process was developed and "Design Of Experiment" (DOE) was used to achieve processing optimization for thick and crack free films. Tight parameter control allowed to develop a highly reproducible PZT diol process. The crystallization behaviour of crack-free PbZr 0.53 Ti 0.47 O 3 films (1-5 μm) with oriented perovskite structure was examined by X-ray diffraction and surface analysis using scanning electron microscopy. Piezoelectric and dielectric properties were examined. The effective transverse piezoelectric coefficient e 31,f of sol-gel processed films was investigated for 4 μm thick layers. Best properties were achieved with {1 0 0}-textured films, where a remanent e 31,f value of −7.3 C/m 2 was measured for 4.1 μm thick films.

Ferroelectric and piezoelectric properties of lead-free BaTiO3 doped Bi0.5Na0.5TiO3 thin films from metal-organic solution deposition

“…The majority of the chemical solution deposition processes are based on the use of 2-methoxyethanol (2MOE) as a co-solvent with the organometallic precursors Ti alkoxide and Bi, Na, and Ba carboxylates [16,25,28]. The resulting solutions are not only toxic, but also require a high number of deposition and annealing steps, due to their low concentration [29]. It would be beneficial to remove the toxic 2MOE from this process, and some work has been reported in that area.…”

Preparation and Dielectric Properties of Oriented PZT Thin Films by LB Technique

“…But it is well-known artificially ordered structures of organic films prepared as a result of subsequent transfer of monolayer from gas-liquid interface onto solid substrates. Moreover, the lack of thermal and mechanical stability led the researches on inorganic ferroelectric ultrathin films relative less and usually without very satisfied results [3].…”