“…On the one hand, the chlorine free radical facilitates the transformation of trichlorosilane to the trichlorosilyl radical (Step ⑬); on the other hand, it accelerates the transformation of the trichlorosilyl radical to tetrachlorosilane (Step ⑰), so the selectivity to phenyltrichlorosilane decreases. Steps ⑥ to ⑫ show the most probable step for dichlorosilylene generation [11]. Some other possible steps of dichlorosilylene generation are shown as Steps ⑩ and ⑪.…”