1996
DOI: 10.1143/jjap.35.2731
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Pyroelectric Properties of Sol-Gel Derived Lanthanum Modified Lead Titanate Thin Films

Abstract: Lanthanum-modified lead titanate (PLT) thin films were fabricated on Pt/Ti/SiO2/Si substrate using the sol-gel method and rapid thermal annealing technique. The pyroelectric coefficient, and the infrared responsivity and the detectivity of the films were measured using static and dynamic methods, respectively. The ferroelectric properties were also measured. The pyroelectric coefficient increased from 1.3 to 2.5 nC/cm2· K with increasing La content. However, these low coefficients of PLT films ar… Show more

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Cited by 23 publications
(6 citation statements)
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“…Significant effort has been directed at Pb-based perovskites (PLZT) because film properties can be manipulated by controlling the composition of the films. Pyroelectric effects have been reported for films made by a number of thin film techniques, including spin-on [3,4], sputtering , and ion-beam deposition [8]. Chemical vapor deposition is widely acknowledged as a desirable process for manufacturing because of the ability to scale the process to large areas with good uniformity, high deposition rate, and the ability to produce conformal coatings.…”
Section: Introductionmentioning
confidence: 99%
“…Significant effort has been directed at Pb-based perovskites (PLZT) because film properties can be manipulated by controlling the composition of the films. Pyroelectric effects have been reported for films made by a number of thin film techniques, including spin-on [3,4], sputtering , and ion-beam deposition [8]. Chemical vapor deposition is widely acknowledged as a desirable process for manufacturing because of the ability to scale the process to large areas with good uniformity, high deposition rate, and the ability to produce conformal coatings.…”
Section: Introductionmentioning
confidence: 99%
“…[1,2]. Pyroelectric applications of these thin films that have been commercialized or demonstrated to date include thermal imaging and gas detection [3].…”
Section: Introductionmentioning
confidence: 99%
“…11) Consequently, the performance of the pyroelectric IR detector can be further improved by thermal isolation from its substrate through the lowering of heat capacity by etching the back of the Si substrate, so that the induced pyroelectric current can respond fully to the incident IR light. 12) In this study, LiTaO 3 thin films were prepared on Pt(111)/ Ti/SiO 2 /Si(100) substrates by the diol-based sol-gel method, and IR detectors with various membrane thicknesses (d), controlled by the anisotropic etching technique, were fabricated. 13,14) The influence of membrane thickness on the pyroelectric properties of thin film detectors was investigated, and the voltage responsivity (R v ), noise voltage (V n ) and specific detectivity (D Ã ) of detectors were measured using a dynamic analysis system.…”
Section: Introductionmentioning
confidence: 99%