Pursuing the Increase of Factory Automation in 200mm Frontend Manufacturing to Manage the Changes Imposed by the Transitionfrom High-Volume Low-Mix to High-Mix Low-Volume Production

Heinrich, Harald; Schneider, Germar; Heinlein, F.; Keil, Sophia; Deutschlander, Arthur; Lasch, Rainer

doi:10.1109/asmc.2008.4529020

Cited by 8 publications

(3 citation statements)

References 7 publications

Supporting

Mentioning

Contrasting

Unclassified

Order By: Relevance

“…Nevertheless, the potential benefits of such opportunity should be previously quantified. With respect to 200mm fabs of Infineon Company, the adaptation of full and stringent automation as an efficient solution to face the migration from high volume-low mix to high mix-low volume was confirmed by [7].…”

Section: A Existing Fab Automationmentioning

confidence: 69%

AMHS design for reticles in photolithography area of an existing wafer fab: IE: Industrial engineering

Ben-Salem

Yugma

Troncet

et al. 2016

2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)

View full text Add to dashboard Cite

In semiconductor manufacturing, most of 200mm fabrication facilities (called fabs) currently existing operate in manual or in semi-automatic material handling system. To remain competitive and to deal with the migration from highvolume/low-mix to high-mix/low-volume, most of these fabs require investment on factory automation especially on handling operations. This paper addresses a problem of Automated Material Handling System (AMHS) design for reticle in a photolithography area of 200mm wafer fab that was not originally designed to have such system. The objective is to define AMHS components: tracks layout, fleet size and management and reticle storing system while taking into account the existing area layout constraints (machine locations, storage area, corridors dimensions…). A simulation approach is adopted to model the Automated Reticle Handling System (ARHS) and analyze the effect on key performance indicators. Using real instances, many simulation tests with alternative designs have been conducted which provided practical feedbacks.

show abstract

Section: A Existing Fab Automationmentioning

confidence: 69%

AMHS design for reticles in photolithography area of an existing wafer fab: IE: Industrial engineering

Ben-Salem

Yugma

Troncet

et al. 2016

2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)

View full text Add to dashboard Cite

show abstract

“…• Mensch (Leistungsfähigkeit und Leistungsbereitschaft) (Heinrich et al 2008;Keil et al 2008;Keil et al 2009). Weitere Arbeiten zur Verbesserung der Fertigung basierend auf Ansätzen aus der Fließfertigung folgten (Eberts et al 2012;…”

Section: Einleitung -Halbleiterindustrieunclassified

Wie innovative Logistik die zukunftssichere und nachhaltige Gestaltung der Automatisierung und Digitalisierung der Halbleiterindustrie unterstützt

Schneider

Lohmer

2021

Logistik in Wissenschaft Und Praxis

Self Cite

View full text Add to dashboard Cite

Innovative Logistik ist eine Schlüsselfunktion in allen industriellen Bereichen und seit vielen Jahren einer der Erfolgsfaktoren bei Unternehmen in ihrem steten Wandel hin zu neuen Produkten und neuen Märkten. Dieser Artikel zeigt am besonderen Beispiel der Halbleiterindustrie als Einzelfallstudie, mit welchen Logistikmethoden das Unternehmen Infineon Technologies Dresden in enger Zusammenarbeit mit der Professur für BWL, insb. Logistik der TU Dresden eine führende Rolle in der Automatisierung zu einem der modernsten Unternehmen der Halbleiterindustrie erreichen konnte. Der Wandel von einer Hochvolumen-Fabrik mit wenigen Produkten zu einer kundenorientierten Logikfabrik konnte erfolgreich gestaltet werden. Parallel arbeiteten die Partner beständig an der digitalen Transformation des Unternehmens zur kontinuierlichen Steigerung der Produktivität und der Wettbewerbsfähigkeit. Dieser Artikel gibt eine Übersicht über die wichtigsten Arbeiten der letzten Jahre, in denen innovative Logistikmethoden einen entscheidenden Beitrag zur erfolgreichen Gestaltung des Wandels leisteten.

show abstract

“…Our case company Infineon Technologies Dresden (IFD) has automated its 200 mm (8") customerspecific logic fabrication over the years to one of the highest automated manufacturing lines in the world. The facility can also manage a high product mix, including complex logistical activities (Heinrich et al 2008). In the year 2011, the company started the first worldwide production of power semiconductors on 300 mm (12") wafers, which runs on a higher product mix in parallel to the 200 mm production line.…”

Section: Introductionmentioning

confidence: 99%

Simulation-Based Evaluation of Lot Release Policies in a Power Semiconductor Facility – a Case Study

Henriette

Flechsig

Lohmer

et al. 2020

2020 Winter Simulation Conference (WSC)

Self Cite

View full text Add to dashboard Cite

Lot release policies, i.e., the decision which lots to start in production, in what quantity and at what time, have a significant influence on fab performance. Recent research focused on closed-loop policies. However, most studies only demonstrated the feasibility in settings with low-mix or low-volume simulation testbeds. In this paper, we focus on a real-world pre-assembly facility in a high-volume and high-mix semiconductor wafer fab. We conduct an in-depth, deterministic discrete-event simulation in two stages, using real production data and demands. First, we test two existing open-loop lot release policies (random and constant release) against a simple closed-loop release policy. Significant improvements in on-time delivery, bottleneck utilization, and throughput are notable. Second, we compare three closed-loop release policies and indicate which policy provides the best results for certain KPIs like enhanced on-time delivery or reduced tardiness.

show abstract

Pursuing the Increase of Factory Automation in 200mm Frontend Manufacturing to Manage the Changes Imposed by the Transitionfrom High-Volume Low-Mix to High-Mix Low-Volume Production

Cited by 8 publications

References 7 publications

AMHS design for reticles in photolithography area of an existing wafer fab: IE: Industrial engineering

AMHS design for reticles in photolithography area of an existing wafer fab: IE: Industrial engineering

Wie innovative Logistik die zukunftssichere und nachhaltige Gestaltung der Automatisierung und Digitalisierung der Halbleiterindustrie unterstützt

Simulation-Based Evaluation of Lot Release Policies in a Power Semiconductor Facility – a Case Study

Contact Info

Product

Resources

About