Purification of Au EBID structures by electron beam post-irradiation under oxygen flux at room temperature

Mehendale, Shruti; Mulders, J.J.L.; Trompenaars, P.H.F.

doi:10.1016/j.mee.2015.03.034

Cited by 18 publications

(22 citation statements)

References 16 publications

(17 reference statements)

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“…It was found that the O 2 -to-precursor flux ratio had to be as large as 3.5×10 4 to obtain the highest Pt metal content. This is in accordance with the results of other work which found that below a threshold value of the flux ratio pure Pt deposition does not occur [45]. These extreme flux ratios can only be realized by reducing the precursor flux to very small values while in parallel increasing the O 2 flow.…”

Section: Precursorsupporting

confidence: 93%

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Focused electron beam induced deposition meets materials science

Huth

Porrati

Dobrovolskiy

2018

Microelectronic Engineering

153

172

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simulation-assisted growth of complex three-dimensional nano-architectures is also covered. In the review particular emphasis is laid on conceptual clarity in the description of the different developments, which is reflected in the mostly schematic nature of the presented figures, as well as in the recurring final sub-sections for each of the main topics discussing the respective "challenges and perspectives".

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Section: Precursorsupporting

confidence: 93%

“…2(b). The same oxygen-based approach was shown to be effective for Au-containing FEBID deposits [45]. Geier, Winkler and collaborators could show that using H 2 O as reactive gas in an environmental SEM is very efficient in purifying Pt(C) and Au(C) FEBID structures [55,25] (see Fig.…”

Section: Post-growth Purification and Surface-activated Growthmentioning

confidence: 98%

Focused electron beam induced deposition meets materials science

Huth

Porrati

Dobrovolskiy

2018

Microelectronic Engineering

153

172

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“…More than ten measurements resulted in resistivities from 10.9 μΩ cm down to a best case of 8.8 μΩ cm. To our knowledge, the highest FEBID gold conductivity was achieved by post-deposition purification, resulting in a resistivity of 17 μΩ cm 43 . For comparison, the bulk resistivity of gold is 2.2 μΩ cm 43 .…”

Section: Resultsmentioning

confidence: 98%

“…To our knowledge, the highest FEBID gold conductivity was achieved by post-deposition purification, resulting in a resistivity of 17 μΩ cm 43 . For comparison, the bulk resistivity of gold is 2.2 μΩ cm 43 . With an oxidative enhancement during Au deposition, the resistivity of gold was just 4-fold higher than that of pure gold.…”

Section: Resultsmentioning

confidence: 98%

“…However, these precursors became unpopular owing to their thermal instability, resulting in premature decomposition. Different post-deposition purification techniques 32 33 34 , such as annealing 35 36 , substrate heating 37 38 , laser-assisted FEBID 39 , electron beam curing 40 and post-deposition exposure to water 41 42 and oxygen flux 43 have been utilized to purify various FEBID structures. However, there is no in situ deposition procedure that can deposit highly pure and conductive FEBID Au in a single process step.…”

mentioning

confidence: 99%

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Highly conductive and pure gold nanostructures grown by electron beam induced deposition

Shawrav

Taus

Wanzenboeck

et al. 2016

Sci Rep

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This work introduces an additive direct-write nanofabrication technique for producing extremely conductive gold nanostructures from a commercial metalorganic precursor. Gold content of 91 atomic % (at. %) was achieved by using water as an oxidative enhancer during direct-write deposition. A model was developed based on the deposition rate and the chemical composition, and it explains the surface processes that lead to the increases in gold purity and deposition yield. Co-injection of an oxidative enhancer enabled Focused Electron Beam Induced Deposition (FEBID)—a maskless, resistless deposition method for three dimensional (3D) nanostructures—to directly yield pure gold in a single process step, without post-deposition purification. Gold nanowires displayed resistivity down to 8.8 μΩ cm. This is the highest conductivity achieved so far from FEBID and it opens the possibility of applications in nanoelectronics, such as direct-write contacts to nanomaterials. The increased gold deposition yield and the ultralow carbon level will facilitate future applications such as the fabrication of 3D nanostructures in nanoplasmonics and biomolecule immobilization.

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Advances in Deposition of Metals from Metal Enolates

Lang

Adner

Georgi

2016

Patai's Chemistry of Functional Groups

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This chapter describes the use of metal enolates as precursors for the deposition and growth of nano‐sized materials of a large variety of metal, mixed metal‐metal oxide, and alloy layers and patterns, an area that has rapidly developed during the last couple of decades. As metal enolates, mostly mononuclear main group, transition metal, and rare earth metal complexes featuring various β‐diketonate or β‐ketoiminate ligands have been used. Based on their intrinsic properties, for example, reactivity, transparency, conductivity, and magnetism, a large variety of metal and/or metal oxide deposits are available at present. As deposition processes, mainly gas‐phase (e.g., CVD2–9 and ALD8–19) or liquid‐phase procedures (including spin‐coating, dip‐coating, sol–gel, and printing techniques) were used. Controlled decomposition of the appropriate metal enolates allows the generation of diverse metal and metal oxide materials, for example, dense or porous thin layers and nanomaterials in the form of particles, dots, rods, tubes, and wires. Where appropriate, the similarities and differences, including elementary decomposition steps that are common for the respective metal enolate precursors, are discussed as well.

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Purification of Au EBID structures by electron beam post-irradiation under oxygen flux at room temperature

Cited by 18 publications

References 16 publications

Focused electron beam induced deposition meets materials science

Focused electron beam induced deposition meets materials science

Highly conductive and pure gold nanostructures grown by electron beam induced deposition

Advances in Deposition of Metals from Metal Enolates

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