2018
DOI: 10.1016/j.jmmm.2018.03.056
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Pure phase BiFeO3 thin films sputtered over Si: A new route towards high magnetization

Abstract: We have investigated the structural and magnetic properties of BiFeO 3 (BFO) thin films grown over (100)-oriented Si substrates by rf magnetron sputtering in a new route under O 2 free low pressure Ar atmosphere. Single-phase BFO films were deposited in a heated substrate and post-annealed in situ. The new routed allows high deposition rate and produce polycrystalline BFO pure phase, confirmed by high resolution X-ray diffraction. Scanning electron and atomic force microscopy reveal very low surface roughness … Show more

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Cited by 15 publications
(9 citation statements)
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“…A low-pressure argon atmosphere (work pressure of 3 mTorr) was used to minimize chemical changes and reduce the presence of BFO spurious phases. The substrate deposition temperature was kept at 873 K, with further in-situ annealing at 973 K for 60 min after the film deposition [12]. In grazing incidence mode, the thin-film crystalline structure was studied by high-resolution X-ray diffraction (HR-XRD) performed in the Brazilian Synchrotron Light Laboratory (LNLS), with 1.3776 Å wavelength.…”
Section: Methodsmentioning
confidence: 99%
See 1 more Smart Citation
“…A low-pressure argon atmosphere (work pressure of 3 mTorr) was used to minimize chemical changes and reduce the presence of BFO spurious phases. The substrate deposition temperature was kept at 873 K, with further in-situ annealing at 973 K for 60 min after the film deposition [12]. In grazing incidence mode, the thin-film crystalline structure was studied by high-resolution X-ray diffraction (HR-XRD) performed in the Brazilian Synchrotron Light Laboratory (LNLS), with 1.3776 Å wavelength.…”
Section: Methodsmentioning
confidence: 99%
“…One way to reduce the presence of these phases during the BFO film preparation consists of using a mixed atmosphere of O 2 with an inert gas such as argon or nitrogen [11]. One can obtain pure phase BFO thin films over Si (100) by sputtering in an argon atmosphere at low pressure [12]. One way to study the thin film's surface properties is through X-ray Photoelectron Spectroscopy (XPS).…”
Section: Introductionmentioning
confidence: 99%
“…In general, the reports in the literature focus on preparing thin film materials requiring an deposited surfaces such as LaAlO3, glass and amorphous silica substrates under encompassing various precursors routs [37][38][39][40] . For examples, the chemical vapor deposition 41,42 , pulsed laser deposition 43,44 , sputtering 45,46 , sol-gel process 47,48 and the polymeric 49,50 methods were employ to grow BiFeO3thin films. As displayed in Fig.…”
Section: Two Dimensional Nanostructuresmentioning
confidence: 99%
“…It is desirable to achieve suppression of the spin-cycloid in BiFeO 3 at room temperature to pave way for enhanced magnetic properties. This can be realized through chemical substitution, [10][11][12][13][14][15][16][17] inducing strain in thin lms, [18][19][20][21] high magnetic elds, [22][23][24][25][26][27] hydrostatic pressure [28][29][30] and nite size effects. [31][32][33][34][35][36] Of these, aliovalent doping controls the chemistry of the material and oen could result in increased chemical pressure that would work similar to applying hydrostatic pressure externally.…”
Section: Introductionmentioning
confidence: 99%