Pure Anatase Phase Titanium Dioxide Films Prepared by Mist Chemical Vapor Deposition

Abstract

In this research, pure anatase phase titanium dioxide thin films were successfully fabricated for the first time using the mist chemical vapor deposition method, and optional values for deposition temperature and concentration of titanium tetraisopropoxide were established. It was found that the crystallinity of the titanium dioxide film was significantly improved by increasing the deposition temperature. The best crystallinity of titanium dioxide film was obtained at 400 °C. It was confirmed that pure anatase phase titanium dioxide films could be obtained using different concentrations of titanium tetraisopropoxide. The lower concentration of titanium tetraisopropoxide produced better crystallinity in the resultant titanium dioxide film. The morphologies of the titanium dioxide thin films were also significantly influenced by the concentration of titanium tetraisopropoxide in the precursor solution.

TiO2 Coated ZnO Nanorods by Mist Chemical Vapor Deposition for Application as Photoanodes for Dye-Sensitized Solar Cells

“…During transportation of the mist droplets in the reaction chamber, the size of the mist droplets decreased from a few micrometers to a few nanometers under the influence of heat, evapotranspiration and burst. Finally, anatase phase TiO 2 particle shells were deposited on the surface of the ZnO nanorods due to the pyrolysis reaction of TTIP at 400 °C [28].…”

“…However, control of the phase, thickness and uniformity of the TiO 2 layer remain unsolved issues. According to our previous research [28,29], mist chemical vapor deposition (mist CVD) [30] is an effective method of synthesizing pure anatase phase TiO 2 thin films.…”

“…The nanoscale was maintained until deposition. Due to gravity and adsorption, the mist droplets moved effectively onto the substrate, which was set in the reaction chamber with the appropriate heating [28,30].…”

Synthesis and Characterization of Titanium Dioxide Nanomaterials via Horizontal Vapor Phase Growth (Hvpg) Technique

“…There are several methods of fabricating the TiO2 nanomaterials that were used in previous studies such as sol-gel [1,[3][4][5][6][7], chemical vapor deposition [8,9], and physical vapor deposition. However, the said methods are still inefficient strategies to synthesize the TiO2 nanomaterials for an engine oil sensor.…”

Titanium Dioxide Coatings Doubly-Doped with Ca and Ag Ions as Corrosion Resistant, Biocompatible, and Bioactive Materials for Medical Applications

“…It is a hard, corrosion resistant, and well biocompatible material with UV-induced hydrophilicity [1]. Literature studies show that several techniques for titanium dioxide coatings preparation, such as thermal and electrochemical oxidation (in case of titanium substrates) [2,3], magnetron sputtering [4,5], chemical vapor deposition [6][7][8][9], and sol-gel [2,7,[10][11][12][13] have been investigated. But one of the most frequently used methods is sol-gel due to its high application potential [14].…”