Citation: Vella P, Dimov S, Brousseau E and Whiteside BR (2015) 'A new process chain for producing bulk metallic glass replication masters with micro-and nano-scale features' The International Journal of Advanced Manufacturing Technology. 76(1): 523-543. candidates for the first step in this master making process chain. The capabilities of the component technologies together with some issues associated with their integration were studied. To validate the replication performance of the produced masters, a Zr-based BMG insert was used to produce a small batch of micro fluidic devices by micro-injection moulding. Furthermore, an experimental study was also carried out to determine whether it would be possible by NS laser ablation to structure the Zr-based BMG workpieces with a high surface integrity while retaining the BMG' s non-crystalline morphology. Collectively, it was demonstrated that the proposed process chain could be a viable fabrication route for mass production of polymer devices incorporating different length scale features.