Pulsed laser deposition of stoichiometric LiNbO3 thin films by using O2 and Ar gas mixtures as ambients

Ogale, S. B.; Nawathey‐Dikshit, Rashmi; Dikshit, S. J.; Kanetkar, S. M.

doi:10.1063/1.350509

Cited by 59 publications

(22 citation statements)

References 12 publications

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“…The use of pulsed laser deposition helped to overcome this problem by producing highly textured LN films. [9][10][11][12] Whereas there are some reports on the secondorder nonlinear response of LN textured films, 11,12 to our knowledge, there is just one work reporting the successful doping of textured LN films by covering the substrate with an Er layer that was later indiffused by annealing thus leading to a nonhomogeneous Er profile. 13 The aim of this work is twofold: First, to study the influence of doping LN with Er on the second-harmonic ͑SH͒ response, and second, to report the growth of strongly textured Er-LN films in a single-step process, with a controlled depth profile and with excellent PL and SH performances when compared to those of the bulk crystalline material.…”

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confidence: 96%

Enhanced second-order nonlinear optical response of LiNbO3 films upon Er doping

Gonzalo

Chaos

Suárez-Garcı́a

et al. 2002

Applied Physics Letters

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Erbium-doped LiNbO3 films have been produced in a single-step process by alternate pulsed laser deposition. The dopant is incorporated in submonolayers whose nominal indepth separation is varied in the range 1.7–4.0 nm to lead respectively to Er concentrations in the range 3.4–0.6×1020 atoms/cm−3. All the films exhibit the characteristic Er3+ photoluminescence at 1.54 μm with lifetime values as high as 3 ms. The d33 nonlinear coefficients determined from second-harmonic generation experiments are in the range 22–28 pm/V, the films having nominal Er submonolayer indepth separation of 3–4 nm exhibiting d33 values slightly above that of the bulk material. The comparison of the d33 values obtained in the Er-doped films to those reported earlier for similar undoped films shows clearly that both the structural quality and the second-harmonic performance of the films can be enhanced by Er doping.

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confidence: 96%

Enhanced second-order nonlinear optical response of LiNbO3 films upon Er doping

Gonzalo

Chaos

Suárez-Garcı́a

et al. 2002

Applied Physics Letters

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“…7 Although PLD has proven to be one of the m ost successful techniques in growing complex oxide materials, 8 the lms deposited by ablation of LiNbO 3 in vacuum or low pressure (,1 torr) atmospheres are often found to be Li de cient. 9,10 However, recent results indicate that when the growth is carried out at a pressure of about 1 torr, independent of the nature of the ambient atmosphere used (either inert or reactive), the LiNbO 3 lms grow stoichiometrically, though their crystallinity is slightly better when using Ar. 11 We reported earlier on a spectroscopic study of the light emitted from the plasm a formed by laser ablation of a LiNbO 3 single crystal in vacuum.…”

Section: Introductionmentioning

confidence: 99%

Effect of Ar and O₂ Atmospheres on the Fundamental Properties of the Plasma Produced by Laser Ablation of Lithium Niobate

2002

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The in uence of gas atmospheres (at 1 torr) of different natures, both reactive (O 2 ) and inert (Ar), on the spatial evolution of the electron temperature (T e ) and electron density (N e ) of the plasma generated by laser ablation of a LiNbO 3 target is evaluated by optical emission spectroscopy techniques. It is found that the behavior of N e in the plasma produced in vacuum, argon, and oxygen atmospheres exhibit quite different trends as a function of the distance from the target to the substrate, but the behavior of T e is nearly constant. The spatial constancy of T e in all the atmospheres studied is probably related not only to the low laser irradiance used (0.06 GW cm 22 ), but also to a possible collisional decoupling of the heavy species in the central part of the expanding plasma plume where a low pressure region is formed. The fact that N e is lower in Ar than in O 2 indicates the presen ce of fewer positive ions in the plasma generated in Ar. The impact of this result on the better crystallinity observed in the LiNbO 3 lm s grown in Ar is also discussed.Index Headings: Pulsed laser ablation; Lithium niobate; Argon and oxygen atmospheres; Plasma diagnosis. INT RODUCTIO NPulsed laser deposition (PLD) has become a very promising tool for both advanced micromachining and thin lm deposition. Among the parameters involved in the PLD processes, the laser uence together with the background gas pressure (and nature) and the distance at which the substrate is located are relevant variables inuencing the lm growth process. M oreover, the ablation of solid targets produces, in most cases, a lum inous plasma form ed by neutral and ionized species whose expansion dynamics have been widely studied in order to understand the physical mechanisms controlling the thin lm deposition process and properties. 1 Nevertheless, a very limited number of works have focused on the study of the fundamental plasma parameters, such as the electron temperature and electron density, or the nature of the dominant plasma excitation and ionization processes in different spatial and temporal regions. 2-6 Although they are essential to evaluating the energy and m aterial transport in the plasma, as well as to understanding the plasm a reactivity in connection with its effectiveness in the processes of thin-lm growth and composition, such studies have only been perform ed in ablation of m etals, 2,3 graphite, 4 and YBa 2 Cu 3 O 7 . 5 Lithium niobate (LiNbO 3 ) is a well-known m aterial with excellent nonlinear properties of interest for m any applications that normally require the production of high quality thin lms.7 Although PLD has proven to be one of the m ost successful techniques in growing complex oxide materials, 8 the lms deposited by ablation of LiNbO 3 in vacuum or low pressure (,1 torr) atmospheres are often found to be Li de cient. 9,10 However, recent results indicate that when the growth is carried out at a pressure of about 1 torr, independent of the nature of the ambient atmosphere used (either inert or reactive), the LiN...

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“…Single crystal films of LN and LT are deposited by various methods such as liquid phase epitaxy (LPE), 1) metal organic chemical vapor deposition (MOCVD), 2,3) pulsed laser deposition (PLD), [4][5][6][7][8] sol-gel method [9][10][11] and sputtering technique. 12) However, only a few papers have been reported for processing of LNT.…”

Section: Introductionmentioning

confidence: 99%

Transmission Electron Microscopic Studies of LiNb0.5Ta0.5O3 Films Deposited on Sapphire Substrates by Thermal Plasma Spray CVD (Microstructure of LiNb0.5Ta0.5O3 Films Deposited by Thermal Plasma Spray CVD)

et al. 2002

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Cross sections and plan views of LiNb 0.5 Ta 0.5 O 3 films were investigated mainly by high-resolution transmission electron microscopy. These films were deposited on (0001) sapphire substrates by thermal plasma spray chemical vapor deposition method at various feeding rates of liquid raw materials. It was found that the crystallinity and the preferential orientation of the LNT films depend on the feeding rate. The LNT film formed at the feeding rate of 7 mL/min was epitaxially grown on the substrate, and the orientation relationship between the film and the substrate was (0001) LNT //(0001) sapphire , [1120] LNT //[1120] sapphire . The LNT films fabricated at the higher and the lower feeding rate were polycrystalline. These films included twin crystals and other phases such as Li(Nb, Ta) 3 O 8 . The calculations based on the coincidence of reciprocal lattice points revealed that the epitaxial orientation relationships observed by transmission electron microscopy satisfied the geometrically optimal coherency across the interface.

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Pulsed laser deposition of stoichiometric LiNbO3 thin films by using O2 and Ar gas mixtures as ambients

Cited by 59 publications

References 12 publications

Enhanced second-order nonlinear optical response of LiNbO3 films upon Er doping

Enhanced second-order nonlinear optical response of LiNbO3 films upon Er doping

Effect of Ar and O₂ Atmospheres on the Fundamental Properties of the Plasma Produced by Laser Ablation of Lithium Niobate

Transmission Electron Microscopic Studies of LiNb<SUB>0.5</SUB>Ta<SUB>0.5</SUB>O<SUB>3</SUB> Films Deposited on Sapphire Substrates by Thermal Plasma Spray CVD (Microstructure of LiNb<SUB>0.5</SUB>Ta<SUB>0.5</SUB>O<SUB>3</SUB> Films Deposited by Thermal Plasma Spray CVD)

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Pulsed laser deposition of stoichiometric LiNbO3 thin films by using O2 and Ar gas mixtures as ambients

Cited by 59 publications

References 12 publications

Enhanced second-order nonlinear optical response of LiNbO3 films upon Er doping

Enhanced second-order nonlinear optical response of LiNbO3 films upon Er doping

Effect of Ar and O2 Atmospheres on the Fundamental Properties of the Plasma Produced by Laser Ablation of Lithium Niobate

Transmission Electron Microscopic Studies of LiNb<SUB>0.5</SUB>Ta<SUB>0.5</SUB>O<SUB>3</SUB> Films Deposited on Sapphire Substrates by Thermal Plasma Spray CVD (Microstructure of LiNb<SUB>0.5</SUB>Ta<SUB>0.5</SUB>O<SUB>3</SUB> Films Deposited by Thermal Plasma Spray CVD)

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Effect of Ar and O₂ Atmospheres on the Fundamental Properties of the Plasma Produced by Laser Ablation of Lithium Niobate