2021
DOI: 10.1016/j.vacuum.2021.110613
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Pulsed laser deposition of high-transparency molybdenum oxide thin films

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Cited by 5 publications
(2 citation statements)
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“…The PLD system employed uses a Q-switched tripled Nd:YAG laser (Quantel mod. YG78C20, λ = 355 nm) generating 6 ns width pulses with an energy of 80 mJ per pulse [33,34,36]. The density of energy was maintained at 1.2 J cm −2 , and the repetition rate was 4 Hz.…”
Section: Moo 3 Depositionmentioning
confidence: 99%
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“…The PLD system employed uses a Q-switched tripled Nd:YAG laser (Quantel mod. YG78C20, λ = 355 nm) generating 6 ns width pulses with an energy of 80 mJ per pulse [33,34,36]. The density of energy was maintained at 1.2 J cm −2 , and the repetition rate was 4 Hz.…”
Section: Moo 3 Depositionmentioning
confidence: 99%
“…When the annealing is performed at temperatures greater than 400 • C, it produces monoclinic β-phase MoO 3 films, not useful to exploit an optical phonons response [32]. Pulsed laser deposition (PLD) is a versatile and low-cost deposition technique which has already been employed for the deposition of α-phase MoO 3 films at 500 • C [33] and other metal oxides such as VO 2 [34], and ZnO [35]. Compared with the exfoliation technique, it allows depositing large area MoO 3 films, which can be much more easily handled and integrated into a multilayer structure.…”
Section: Introductionmentioning
confidence: 99%