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Structural quality of LuFeO 3 epitaxial layers grown by pulsed-laser deposition on sapphire substrates with and without platinum Pt interlayers has been investigated by in situ high-resolution X-ray diffraction (reciprocal-space mapping). The parameters of the structure such as size and misorientation of mosaic blocks have been determined as functions of the thickness of LuFeO 3 during growth and for different thicknesses of platinum interlayers up to 40 nm. By means of fitting of the time-resolved X-ray reflectivity curves and by in situ X-ray diffraction measurement, we demonstrate that the LuFeO 3 growth rate as well as the out-of-plane lattice parameter are almost independent from Pt interlayer thickness, while the in-plane LuFeO 3 lattice parameter decreases. We reveal that, despite the different morphologies of the Pt interlayers with different thickness, LuFeO 3 was growing as a continuous mosaic layer and the misorientation of the mosaic blocks decreases with increasing Pt thickness. The X-ray diffraction results combined with ex situ scanning electron microscopy and high-resolution transmission electron microscopy demonstrate that the Pt interlayer significantly improves the structure of LuFeO 3 by reducing the misfit of the LuFeO 3 lattice with respect to the material underneath.the hexagonal phase depend strongly on the mutual orientation of the layer and substrate lattices (epitaxial orientation) as well as on the epitaxial strain (misfit). The epitaxial orientation is determined by the minimum free energy, which is related to the bonding across the substrate-epilayer interface and to the mismatch of the substrate and layer lattices. It is recognized that, despite the triangular symmetry matching on the abovementioned substrates, there is no obvious lattice match between h-RFeO 3 and Al 2 O 3 (0001) (a = 4.7602 Å), yttrium-stabilized zirconia (YSZ) (111) (a = 7.30 Å), or Pt (111) (a = 5.548 Å) [10].Nevertheless, an epitaxial growth of h-LuFeO 3 (LFO) could be obtained using the pulsed-laser deposition [6][7][8][9]11]. This means that the azimuthal epitaxial orientation of h-LuFeO 3 films cannot be explained simply by the lattice mismatch. One should understand the interfacial structure in detail by means of structural investigations performed in situ during pulsed-laser deposition (PLD). This approach reveals how the structural setup of the layer/substrate interface would affect the structure and the morphology of the deposited h-LuFeO 3 .Epitaxial strain is an extremely important issue in epitaxial thin film growth because the strain may change the properties of the epilayer, offering opportunities of material engineering; see the reviews in References [12,13], among others. For the Al 2 O 3 (0001) substrates, the lattice mismatch of the supercell is small but the huge misfit of the lattice constant suggests weak interfacial bonding [10]. The growth of an additional Pt interlayer aims on the one side to reduce the lattice mismatch between the deposited h-LuFeO 3 layer and Al 2 O 3 (0001) substrate an...
Structural quality of LuFeO 3 epitaxial layers grown by pulsed-laser deposition on sapphire substrates with and without platinum Pt interlayers has been investigated by in situ high-resolution X-ray diffraction (reciprocal-space mapping). The parameters of the structure such as size and misorientation of mosaic blocks have been determined as functions of the thickness of LuFeO 3 during growth and for different thicknesses of platinum interlayers up to 40 nm. By means of fitting of the time-resolved X-ray reflectivity curves and by in situ X-ray diffraction measurement, we demonstrate that the LuFeO 3 growth rate as well as the out-of-plane lattice parameter are almost independent from Pt interlayer thickness, while the in-plane LuFeO 3 lattice parameter decreases. We reveal that, despite the different morphologies of the Pt interlayers with different thickness, LuFeO 3 was growing as a continuous mosaic layer and the misorientation of the mosaic blocks decreases with increasing Pt thickness. The X-ray diffraction results combined with ex situ scanning electron microscopy and high-resolution transmission electron microscopy demonstrate that the Pt interlayer significantly improves the structure of LuFeO 3 by reducing the misfit of the LuFeO 3 lattice with respect to the material underneath.the hexagonal phase depend strongly on the mutual orientation of the layer and substrate lattices (epitaxial orientation) as well as on the epitaxial strain (misfit). The epitaxial orientation is determined by the minimum free energy, which is related to the bonding across the substrate-epilayer interface and to the mismatch of the substrate and layer lattices. It is recognized that, despite the triangular symmetry matching on the abovementioned substrates, there is no obvious lattice match between h-RFeO 3 and Al 2 O 3 (0001) (a = 4.7602 Å), yttrium-stabilized zirconia (YSZ) (111) (a = 7.30 Å), or Pt (111) (a = 5.548 Å) [10].Nevertheless, an epitaxial growth of h-LuFeO 3 (LFO) could be obtained using the pulsed-laser deposition [6][7][8][9]11]. This means that the azimuthal epitaxial orientation of h-LuFeO 3 films cannot be explained simply by the lattice mismatch. One should understand the interfacial structure in detail by means of structural investigations performed in situ during pulsed-laser deposition (PLD). This approach reveals how the structural setup of the layer/substrate interface would affect the structure and the morphology of the deposited h-LuFeO 3 .Epitaxial strain is an extremely important issue in epitaxial thin film growth because the strain may change the properties of the epilayer, offering opportunities of material engineering; see the reviews in References [12,13], among others. For the Al 2 O 3 (0001) substrates, the lattice mismatch of the supercell is small but the huge misfit of the lattice constant suggests weak interfacial bonding [10]. The growth of an additional Pt interlayer aims on the one side to reduce the lattice mismatch between the deposited h-LuFeO 3 layer and Al 2 O 3 (0001) substrate an...
COMMUNICATION (1 of 8)Integration of complex oxide materials with traditional electronic materials such as silicon (Si) and III-V semiconductors has attracted tremendous attention and efforts are being spent to overcome the growth challenges due to oxidation of the semiconducting materials and/or large lattice mismatch between those. [1][2][3][4][5][6][7][8][9] A breakthrough occurred for the growth of strontium-titanate (SrTiO 3 or STO) on Si, where, by introducing a 1/2 monolayer strontium (Sr) as a template, the oxidation of Si is prevented and renders the epitaxial growth of STO on Si by molecular beam epitaxy (MBE) possible. [1,2] Another strategy is to deposit an yttria-stabilized zirconia (YSZ) buffer layer to remove Due to its physical properties gallium-nitride (GaN) is gaining a lot of attention as an emerging semiconductor material in the field of high-power and high-frequency electronics applications. Therefore, the improvement in the performance and/or perhaps even extension in functionality of GaN based devices would be highly desirable. The integration of ferroelectric materials such as lead-zirconate-titanate (PbZr x Ti 1-x O 3 ) with GaN has a strong potential to offer such an improvement. However, the large lattice mismatch between PZT and GaN makes the epitaxial growth of Pb(Zr 1-x Ti x )O 3 on GaN a formidable challenge. This work discusses a novel strain relaxation mechanism observed when MgO is used as a buffer layer, with thicknesses down to a single unit cell, inducing epitaxial growth of high crystallinity Pb(Zr 0.52 Ti 0.48 ) O 3 (PZT) thin films. The epitaxial PZT films exhibit good ferroelectric properties, showing great promise for future GaN device applications.
Pulsed laser deposition (PLD) is one of the important techniques for the growth of oxide thin films, interfaces, and superlattices. It can also be utilized to implement diverse combinatorial approaches. Thin film growth using PLD hinges on various parameters that decide the composition, structure, quality, and finally the physical properties of the films, interfaces, and superlattices. In this paper it is demonstrated how the growth conditions inside the chamber during the growth can be judged from outside by combining in situ and ex situ techniques. An example of the growth of LaVO3‐SrTiO3 interface is given to elucidate the effect of repetitive growth on the chamber condition and hence on the reproducibility of the physical properties of the samples. The experiments suggest noticeable change in transport properties with successive deposition processes.
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