Pulsed excimer laser processing of optical thin films

Microstructural evolution of oxides and semiconductor thin films

“…These characteristics make PLD an attractive option for the deposition of SnO 2 thin films. The successful production of this SnO 2 sensor has been recently demonstrated [21][22][23][24][25][26]. The properties of the thin film strongly depend on its microstructure, composition, atomic structure, local chemistry of interfaces, and crystal defects, which all result from the fabrication process.…”

“…After the nucleation of Pd 2 Ge and c-Ge, reactions (19), (20) and (23) are mutually competitive. The Pd 2 Ge and PdGe compounds were distributed uniformly in the matrix regions due to the presence of reaction (23). Contrarily, due to the presence of reactions (19) and (20), the amount of a-Ge reduced, and the reaction (23) was restrained or cannot occur at all.…”

“…It is found that Pd 2 Ge and PdGe compounds formation may be dominant at low annealing temperatures, and their formation also affect a-Ge crystallization. Reactions (19), (20) and (23) are sensitively dependent on the annealing temperatures and the thickness ratio of Pd and Ge films. The reactions and a-Ge crystallization are mutually competitive in Pd-Ge alloy thin films.…”

Nanostructured Metal Oxide Gas Sensors for Air-Quality Monitoring

“…These include ultrahigh vacuum and reactive electron beam evaporation [3][4][5][6][7][8][9][10], chemical vapor deposition (CVD) by thermal, plasma or laser technique [11][12][13], reactive radio-frequency (RF) or magnetron sputtering [14][15][16][17][18][19][20][21][22][23][24][25][26], laser ablation [27][28][29][30][31][32], the sol-gel technique [32][33][34][35][36], screen printing technology [37,38], electrochemical deposition [7,39], and pyrosol methods [40][41][42][43]. Various techniques have been used for the deposition of the gas-sensitive layer.…”