Pulse radiolysis of carboxylic acids used as ligands of metal oxide nanocluster resists

Abstract

The radiation-induced reactions of ligands play an important role in the sensitization of metal oxide nanocluster resists. However, the details in the radiation chemistry of ligands for metal oxide nanocluster resists are still unknown. In this study, the radiation-induced reactions of carboxylic acid ligands were investigated using a pulse radiolysis method. The rate constants for the reactions of molecular and ionic forms of tiglic, angelic, otoluic, and p-toluic acids with hydrated electrons were determined. The rate constants for the reactions of tiglic, angelic, benzoic, o-toluic, and ptoluic acids with dodecane radical cations were also determined. The radical ions of tiglic and angelic acids were more unstable than those of benzoic, o-toluic, and p-toluic acids. The results obtained in this study indicate that the molecular structures of ligands affect their reactivity to cationic and anion species and the stability of their radical cations and anions.

Extreme Ultraviolet Lithographic Performance and Reaction Mechanism of Polymeric Resist─Utilizing Radical- and Acid-Amplified Cross-Linking

“…By using specific solvents and scavengers, the behavior of each monomer upon electron attachment and detachment was studied individually. These solvents can increase the lifetime of the cations or electrons (formed after the irradiation of ionizing radiation). , To scavenge electrons, CH 2 Cl 2 was used. After ionization, the electrons are emitted from CH 2 Cl 2 as follows. normalC normalH 2 normalC normall 2 → true ionizing radiation normalC normalH 2 normalC normall 2 • + + e − …”

“…These solvents can increase the lifetime of the cations or electrons (formed after the irradiation of ionizing radiation). 22,32 To scavenge electrons, CH 2 Cl 2 was used. After ionization, the electrons are emitted from CH 2 Cl 2 as follows.…”

Reaction mechanisms of Sn-complex-side-chain polymer used for extreme ultraviolet lithography, studied by electron pulse radiolysis and γ-radiolysis

“…The mechanisms of reaction control have been described elsewhere. 25,26) A system tracking only hole transfer is called a "cation reaction system," whereas a system tracking only electron transfer is called an "electron reaction system." The solvents used in this study are summarized in Table I.…”

Decarboxylation efficiency of carboxylic acids as ligands of metal oxide nanocluster resists upon γ-ray irradiation

“…In our previous works, [27][28][29] the ionic states of intermediates of carboxylic acids were clarified. Anion radicals, dianion 036503-4…”

“…28) CO 2 in C 12 H 26 solutions was generated in the presence of electrons and radical cations. Therefore, the rate constants for hole transfer obtained in n-C 12 H 26 solutions were compared with G CO2 obtained in CH 2 Cl 2 [CO 2 derived from carboxylic acid…”