Pulse Modulation as a Way to Improve the  Quality of Plasma Coatings

Kadirmetov, Anvar; Buhtoyarov, Vladimir; Popov, P. I.

doi:10.34220/2311-8873-2020-3-3-140-142

Voronezh Scientific-Technical Bulletin

2020

DOI: 10.34220/2311-8873-2020-3-3-140-142

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Pulse Modulation as a Way to Improve the Quality of Plasma Coatings

Anvar Kadirmetov¹,

Vladimir Buhtoyarov²,

P. I. Popov³

Abstract: The article discusses methods for pulse modulation of electrical parameters during plasma sputtering. The advantages and disadvantages of modulation are considered.

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Pulse Modulation as a Way to Improve the Quality of Plasma Coatings

Abstract: The article discusses methods for pulse modulation of electrical parameters during plasma sputtering. The advantages and disadvantages of modulation are considered.

Cited by 0 publications

References 1 publication

No citations

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