Pull-in Voltage Reduction in Electrostatic Airgap Actuator Using 12 NM-Ultrathin Internal Dielectric Transduction

Verma, Satish K.; Mitra, Bhaskar

doi:10.1109/mems49605.2023.10052612

Cited by 3 publications

(2 citation statements)

References 7 publications

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“…However, this approach necessitated a relatively high temperature for the electrothermal actuation. In [25], a different method of internal dielectric transduction was used to reduce the pull-in voltage from 1.27 V to 0.62 V. All of the solutions mentioned are very unique, tailored to the specific application and fabrication method. Furthermore, as mentioned above, they only address the high voltage problem and do not necessarily consider the limited travel range.…”

Section: Introductionmentioning

confidence: 99%

Impact of Solid Materials in the Gap Space between Driving Electrodes in a MEMS Tri-Electrode Electrostatic Actuator

Allameh,

Park,

Shafai

2024

Sensors

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MEMS electrostatic actuators can suffer from a high control voltage and a limited displacement range, which are made more prevalent by the pull-in effect. This study explores a tri-electrode topology to enable a reduction in the control voltage and explores the effect of various solid materials forming the space between the two underlying stationary electrodes. Employing solid dielectric material simplifies fabrication and can reduce the bottom primary electrode’s fixed voltage. Through numerical analysis, different materials were examined to assess their impact. The results indicate that the primary electrode’s fixed voltage can be reduced with an increase in the dielectric constant, however, with the consequence of reduced benefit to control voltage reduction. Additionally, charge analysis was conducted to compare the actuator’s performance using air as the gap-spacing material versus solid materials, from the perspective of energy conservation. It was found that solid materials result in a higher accumulated charge, reducing the need for a high fixed voltage.

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Section: Introductionmentioning

confidence: 99%

Impact of Solid Materials in the Gap Space between Driving Electrodes in a MEMS Tri-Electrode Electrostatic Actuator

Allameh,

Park,

Shafai

2024

Sensors

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“…Internal dielectric transducers have been extensively researched and utilized in MEMS resonators, but their usage in static actuation is limited [16][17][18]. In a prior work we had demonstrated that ultrathin dielectric transduction (UDT) can be used to provide large deflection pull-in free actuation of MEMS devices [19].…”

Section: Introductionmentioning

confidence: 99%

Ultrathin internal dielectric electrostatic actuator for reduced pull-in voltage and bidirectional actuation

Verma,

Mitra

2023

J. Micromech. Microeng.

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Direction and analog deflection control, as well as low voltage digital switching are the most desirable attributes in electrostatic actuators for current MEMS applications. In this work we show how internal dielectric transduction can be used to reduce pull-in voltages without reducing the air gap, and to effect bi-directional actuation. The actuator is a metal–dielectric–metal sandwich. For hybrid actuation to achieve reduced pull-in, the device has a thick bottom metal and a thin top metal, while for the upward actuator the device has a thick top metal and a thin bottom metal. An out-of-plane deflection of 108 nm is achieved using 5 V applied voltage for the upward actuator, while the hybrid actuator shows over 50% reduction in pull-in voltage from 1.26 V to 0.62 V.

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Transduction in M/NEMS—Actuation and Sensing: A Review

Pachkawade

2024

IEEE Sensors J.

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Pull-in Voltage Reduction in Electrostatic Airgap Actuator Using 12 NM-Ultrathin Internal Dielectric Transduction

Cited by 3 publications

References 7 publications

Impact of Solid Materials in the Gap Space between Driving Electrodes in a MEMS Tri-Electrode Electrostatic Actuator

Impact of Solid Materials in the Gap Space between Driving Electrodes in a MEMS Tri-Electrode Electrostatic Actuator

Ultrathin internal dielectric electrostatic actuator for reduced pull-in voltage and bidirectional actuation

Transduction in M/NEMS—Actuation and Sensing: A Review

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